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High-speed graphene transistors with a self-aligned nanowire gate

Author

Listed:
  • Lei Liao

    (University of California)

  • Yung-Chen Lin

    (University of California)

  • Mingqiang Bao

    (University of California)

  • Rui Cheng

    (University of California)

  • Jingwei Bai

    (University of California)

  • Yuan Liu

    (University of California)

  • Yongquan Qu

    (University of California)

  • Kang L. Wang

    (University of California
    California Nanosystems Institute, University of California)

  • Yu Huang

    (University of California
    California Nanosystems Institute, University of California)

  • Xiangfeng Duan

    (University of California
    California Nanosystems Institute, University of California)

Abstract

Graphene transistors There is considerable interest in graphene for high-speed electronics applications because of its high carrier mobility, but conventional device-fabrication processes produce significant defects in the atomically thin carbon sheets that constitute graphene, severely degrading device performance. Liao et al. report a novel fabrication approach that circumvents such degradation by placing a nanowire, with a metallic core and insulating shell, on top of the graphene as a gate electrode. 'Source' and 'drain' electrodes are then deposited on graphene through a self-alignment process that causes no appreciable damage to the graphene lattice and preserves its high carrier mobility. This unique device layout ensures that the edges of the source, drain and gate electrodes are positioned precisely, enabling a transistor performance that is comparable in speed with the best existing devices of a similar size.

Suggested Citation

  • Lei Liao & Yung-Chen Lin & Mingqiang Bao & Rui Cheng & Jingwei Bai & Yuan Liu & Yongquan Qu & Kang L. Wang & Yu Huang & Xiangfeng Duan, 2010. "High-speed graphene transistors with a self-aligned nanowire gate," Nature, Nature, vol. 467(7313), pages 305-308, September.
  • Handle: RePEc:nat:nature:v:467:y:2010:i:7313:d:10.1038_nature09405
    DOI: 10.1038/nature09405
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    Cited by:

    1. Liting Liu & Yang Chen & Long Chen & Biao Xie & Guoli Li & Lingan Kong & Quanyang Tao & Zhiwei Li & Xiaokun Yang & Zheyi Lu & Likuan Ma & Donglin Lu & Xiangdong Yang & Yuan Liu, 2024. "Ultrashort vertical-channel MoS2 transistor using a self-aligned contact," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    2. Seok Hee Lee & Sung Pil Woo & Nitul Kakati & Dong-Joo Kim & Young Soo Yoon, 2018. "A Comprehensive Review of Nanomaterials Developed Using Electrophoresis Process for High-Efficiency Energy Conversion and Storage Systems," Energies, MDPI, vol. 11(11), pages 1-81, November.
    3. Thanh Luan Phan & Sohyeon Seo & Yunhee Cho & Quoc An Vu & Young Hee Lee & Dinh Loc Duong & Hyoyoung Lee & Woo Jong Yu, 2022. "CNT-molecule-CNT (1D-0D-1D) van der Waals integration ferroelectric memory with 1-nm2 junction area," Nature Communications, Nature, vol. 13(1), pages 1-8, December.

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