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MEMS-tunable dielectric metasurface lens

Author

Listed:
  • Ehsan Arbabi

    (California Institute of Technology)

  • Amir Arbabi

    (California Institute of Technology
    University of Massachusetts Amherst)

  • Seyedeh Mahsa Kamali

    (California Institute of Technology)

  • Yu Horie

    (California Institute of Technology)

  • MohammadSadegh Faraji-Dana

    (California Institute of Technology)

  • Andrei Faraon

    (California Institute of Technology)

Abstract

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Suggested Citation

  • Ehsan Arbabi & Amir Arbabi & Seyedeh Mahsa Kamali & Yu Horie & MohammadSadegh Faraji-Dana & Andrei Faraon, 2018. "MEMS-tunable dielectric metasurface lens," Nature Communications, Nature, vol. 9(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:9:y:2018:i:1:d:10.1038_s41467-018-03155-6
    DOI: 10.1038/s41467-018-03155-6
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    Cited by:

    1. Zhiyao Ma & Tian Tian & Yuxuan Liao & Xue Feng & Yongzhuo Li & Kaiyu Cui & Fang Liu & Hao Sun & Wei Zhang & Yidong Huang, 2024. "Electrically switchable 2N-channel wave-front control for certain functionalities with N cascaded polarization-dependent metasurfaces," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    2. Fuhuan Shen & Zhenghe Zhang & Yaoqiang Zhou & Jingwen Ma & Kun Chen & Huanjun Chen & Shaojun Wang & Jianbin Xu & Zefeng Chen, 2022. "Transition metal dichalcogenide metaphotonic and self-coupled polaritonic platform grown by chemical vapor deposition," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    3. Geng-Bo Wu & Jun Yan Dai & Kam Man Shum & Ka Fai Chan & Qiang Cheng & Tie Jun Cui & Chi Hou Chan, 2023. "A universal metasurface antenna to manipulate all fundamental characteristics of electromagnetic waves," Nature Communications, Nature, vol. 14(1), pages 1-14, December.
    4. Maryam Ghahremani & Andrew McClung & Babak Mirzapourbeinekalaye & Amir Arbabi, 2024. "3D alignment of distant patterns with deep-subwavelength precision using metasurfaces," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    5. Sajjad Abdollahramezani & Omid Hemmatyar & Mohammad Taghinejad & Hossein Taghinejad & Alex Krasnok & Ali A. Eftekhar & Christian Teichrib & Sanchit Deshmukh & Mostafa A. El-Sayed & Eric Pop & Matthias, 2022. "Electrically driven reprogrammable phase-change metasurface reaching 80% efficiency," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    6. Soham Saha & Benjamin T. Diroll & Mustafa Goksu Ozlu & Sarah N. Chowdhury & Samuel Peana & Zhaxylyk Kudyshev & Richard D. Schaller & Zubin Jacob & Vladimir M. Shalaev & Alexander V. Kildishev & Alexan, 2023. "Engineering the temporal dynamics of all-optical switching with fast and slow materials," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    7. Huan Lu & Jiwei Zhao & Bin Zheng & Chao Qian & Tong Cai & Erping Li & Hongsheng Chen, 2023. "Eye accommodation-inspired neuro-metasurface focusing," Nature Communications, Nature, vol. 14(1), pages 1-7, December.

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