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Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces

Author

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  • Yuan Zhang

    (Southern University of Science and Technology)

  • Xiaomeng Zhou

    (Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences)

  • Nian Zhang

    (University of Science and Technology of China)

  • Jiaqi Zhu

    (Southern University of Science and Technology)

  • Ningning Bai

    (Southern University of Science and Technology)

  • Xingyu Hou

    (Southern University of Science and Technology)

  • Tao Sun

    (Southern University of Science and Technology)

  • Gang Li

    (Southern University of Science and Technology)

  • Lingyu Zhao

    (Southern University of Science and Technology)

  • Yingchun Chen

    (Commercial Aircraft Corporation of China Ltd.)

  • Liu Wang

    (University of Science and Technology of China
    Chinese Academy of Science)

  • Chuan Fei Guo

    (Southern University of Science and Technology)

Abstract

Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to ~0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range.

Suggested Citation

  • Yuan Zhang & Xiaomeng Zhou & Nian Zhang & Jiaqi Zhu & Ningning Bai & Xingyu Hou & Tao Sun & Gang Li & Lingyu Zhao & Yingchun Chen & Liu Wang & Chuan Fei Guo, 2024. "Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
  • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-47408-z
    DOI: 10.1038/s41467-024-47408-z
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    References listed on IDEAS

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    1. Xinlei Shi & Xiangqian Fan & Yinbo Zhu & Yang Liu & Peiqi Wu & Renhui Jiang & Bao Wu & Heng-An Wu & He Zheng & Jianbo Wang & Xinyi Ji & Yongsheng Chen & Jiajie Liang, 2022. "Pushing detectability and sensitivity for subtle force to new limits with shrinkable nanochannel structured aerogel," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    2. Canan Dagdeviren & Yewang Su & Pauline Joe & Raissa Yona & Yuhao Liu & Yun-Soung Kim & YongAn Huang & Anoop R. Damadoran & Jing Xia & Lane W. Martin & Yonggang Huang & John A. Rogers, 2014. "Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring," Nature Communications, Nature, vol. 5(1), pages 1-10, December.
    3. Gregor Schwartz & Benjamin C.-K. Tee & Jianguo Mei & Anthony L. Appleton & Do Hwan Kim & Huiliang Wang & Zhenan Bao, 2013. "Flexible polymer transistors with high pressure sensitivity for application in electronic skin and health monitoring," Nature Communications, Nature, vol. 4(1), pages 1-8, October.
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    Cited by:

    1. Jie Li & Fan Zhang & Xiaobin Xia & Kaihang Zhang & Jianhui Wu & Yulu Liu & Chi Zhang & Xinyu Cai & Jiaqi Lu & Liangquan Xu & Rui Wan & Dinku Hazarika & Weipeng Xuan & Jinkai Chen & Zhen Cao & Yubo Li , 2024. "An ultrasensitive multimodal intracranial pressure biotelemetric system enabled by exceptional point and iontronics," Nature Communications, Nature, vol. 15(1), pages 1-10, December.

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