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Integrated silicon carbide electro-optic modulator

Author

Listed:
  • Keith Powell

    (The University of Sydney
    Harvard University)

  • Liwei Li

    (The University of Sydney)

  • Amirhassan Shams-Ansari

    (Harvard University)

  • Jianfu Wang

    (The University of Sydney)

  • Debin Meng

    (The University of Sydney)

  • Neil Sinclair

    (Harvard University
    California Institute of Technology)

  • Jiangdong Deng

    (Harvard University)

  • Marko Lončar

    (Harvard University)

  • Xiaoke Yi

    (The University of Sydney)

Abstract

Owing to its attractive optical and electronic properties, silicon carbide is an emerging platform for integrated photonics. However an integral component of the platform is missing—an electro-optic modulator, a device which encodes electrical signals onto light. As a non-centrosymmetric crystal, silicon carbide exhibits the Pockels effect, yet a modulator has not been realized since the discovery of this effect more than three decades ago. Here we design, fabricate, and demonstrate a Pockels modulator in silicon carbide. Specifically, we realize a waveguide-integrated, small form-factor, gigahertz-bandwidth modulator that operates using complementary metal-oxide-semiconductor (CMOS)-level voltages on a thin film of silicon carbide on insulator. Our device is fabricated using a CMOS foundry compatible fabrication process and features no signal degradation, no presence of photorefractive effects, and stable operation at high optical intensities (913 kW/mm2), allowing for high optical signal-to-noise ratios for modern communications. Our work unites Pockels electro-optics with a CMOS foundry compatible platform in silicon carbide.

Suggested Citation

  • Keith Powell & Liwei Li & Amirhassan Shams-Ansari & Jianfu Wang & Debin Meng & Neil Sinclair & Jiangdong Deng & Marko Lončar & Xiaoke Yi, 2022. "Integrated silicon carbide electro-optic modulator," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-29448-5
    DOI: 10.1038/s41467-022-29448-5
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    References listed on IDEAS

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    1. Daisuke Nakamura & Itaru Gunjishima & Satoshi Yamaguchi & Tadashi Ito & Atsuto Okamoto & Hiroyuki Kondo & Shoichi Onda & Kazumasa Takatori, 2004. "Ultrahigh-quality silicon carbide single crystals," Nature, Nature, vol. 430(7003), pages 1009-1012, August.
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    Cited by:

    1. Ekici, Selcuk & Ayar, Murat & Hikmet Karakoc, T., 2023. "Fuel-saving and emission accounting: An airliner case study for green engine selection," Energy, Elsevier, vol. 282(C).
    2. Mittelman, Gur & Eran, Ronen & Zhivin, Lev & Eisenhändler, Ohad & Luzon, Yossi & Tshuva, Moshe, 2023. "The potential of renewable electricity in isolated grids: The case of Israel in 2050," Applied Energy, Elsevier, vol. 349(C).

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