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Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Author

Listed:
  • Frederik Kotz

    (University of Freiburg)

  • Patrick Risch

    (University of Freiburg)

  • Karl Arnold

    (University of Freiburg)

  • Semih Sevim

    (ETH Zurich)

  • Josep Puigmartí-Luis

    (ETH Zurich)

  • Alexander Quick

    (Nanoscribe GmbH)

  • Michael Thiel

    (Nanoscribe GmbH)

  • Andrei Hrynevich

    (University Würzburg)

  • Paul D. Dalton

    (University Würzburg)

  • Dorothea Helmer

    (University of Freiburg)

  • Bastian E. Rapp

    (University of Freiburg)

Abstract

Fused silica glass is the preferred material for applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of particular interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures in glass has proven evasive due to its high thermal and chemical stability as well as mechanical hardness. Here we present an approach for the generation of hollow microstructures in fused silica glass with high precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip.

Suggested Citation

  • Frederik Kotz & Patrick Risch & Karl Arnold & Semih Sevim & Josep Puigmartí-Luis & Alexander Quick & Michael Thiel & Andrei Hrynevich & Paul D. Dalton & Dorothea Helmer & Bastian E. Rapp, 2019. "Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass," Nature Communications, Nature, vol. 10(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:10:y:2019:i:1:d:10.1038_s41467-019-09497-z
    DOI: 10.1038/s41467-019-09497-z
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    Cited by:

    1. Po-Han Huang & Miku Laakso & Pierre Edinger & Oliver Hartwig & Georg S. Duesberg & Lee-Lun Lai & Joachim Mayer & Johan Nyman & Carlos Errando-Herranz & Göran Stemme & Kristinn B. Gylfason & Frank Nikl, 2023. "Three-dimensional printing of silica glass with sub-micrometer resolution," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    2. Ziyong Li & Yanwen Jia & Ke Duan & Ran Xiao & Jingyu Qiao & Shuyu Liang & Shixiang Wang & Juzheng Chen & Hao Wu & Yang Lu & Xiewen Wen, 2024. "One-photon three-dimensional printed fused silica glass with sub-micron features," Nature Communications, Nature, vol. 15(1), pages 1-12, December.

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