IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v10y2019i1d10.1038_s41467-019-09497-z.html
   My bibliography  Save this article

Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Author

Listed:
  • Frederik Kotz

    (University of Freiburg)

  • Patrick Risch

    (University of Freiburg)

  • Karl Arnold

    (University of Freiburg)

  • Semih Sevim

    (ETH Zurich)

  • Josep Puigmartí-Luis

    (ETH Zurich)

  • Alexander Quick

    (Nanoscribe GmbH)

  • Michael Thiel

    (Nanoscribe GmbH)

  • Andrei Hrynevich

    (University Würzburg)

  • Paul D. Dalton

    (University Würzburg)

  • Dorothea Helmer

    (University of Freiburg)

  • Bastian E. Rapp

    (University of Freiburg)

Abstract

Fused silica glass is the preferred material for applications which require long-term chemical and mechanical stability as well as excellent optical properties. The manufacturing of complex hollow microstructures within transparent fused silica glass is of particular interest for, among others, the miniaturization of chemical synthesis towards more versatile, configurable and environmentally friendly flow-through chemistry as well as high-quality optical waveguides or capillaries. However, microstructuring of such complex three-dimensional structures in glass has proven evasive due to its high thermal and chemical stability as well as mechanical hardness. Here we present an approach for the generation of hollow microstructures in fused silica glass with high precision and freedom of three-dimensional designs. The process combines the concept of sacrificial template replication with a room-temperature molding process for fused silica glass. The fabricated glass chips are versatile tools for, among other, the advance of miniaturization in chemical synthesis on chip.

Suggested Citation

  • Frederik Kotz & Patrick Risch & Karl Arnold & Semih Sevim & Josep Puigmartí-Luis & Alexander Quick & Michael Thiel & Andrei Hrynevich & Paul D. Dalton & Dorothea Helmer & Bastian E. Rapp, 2019. "Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass," Nature Communications, Nature, vol. 10(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:10:y:2019:i:1:d:10.1038_s41467-019-09497-z
    DOI: 10.1038/s41467-019-09497-z
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-019-09497-z
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-019-09497-z?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Ziyong Li & Yanwen Jia & Ke Duan & Ran Xiao & Jingyu Qiao & Shuyu Liang & Shixiang Wang & Juzheng Chen & Hao Wu & Yang Lu & Xiewen Wen, 2024. "One-photon three-dimensional printed fused silica glass with sub-micron features," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    2. Po-Han Huang & Miku Laakso & Pierre Edinger & Oliver Hartwig & Georg S. Duesberg & Lee-Lun Lai & Joachim Mayer & Johan Nyman & Carlos Errando-Herranz & Göran Stemme & Kristinn B. Gylfason & Frank Nikl, 2023. "Three-dimensional printing of silica glass with sub-micrometer resolution," Nature Communications, Nature, vol. 14(1), pages 1-10, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:10:y:2019:i:1:d:10.1038_s41467-019-09497-z. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.