Job scheduling of diffusion furnaces in semiconductor fabrication facilities
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DOI: 10.1016/j.ejor.2021.09.044
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Cited by:
- Jianxin Fang & Brenda Cheang & Andrew Lim, 2023. "Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey," Sustainability, MDPI, vol. 15(17), pages 1-44, August.
- Dauzère-Pérès, Stéphane & Ding, Junwen & Shen, Liji & Tamssaouet, Karim, 2024. "The flexible job shop scheduling problem: A review," European Journal of Operational Research, Elsevier, vol. 314(2), pages 409-432.
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Keywords
Manufacturing; Scheduling; Dynamic programming;All these keywords.
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