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Determining the optimal probing lot size for the wafer probe operation in semiconductor manufacturing

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  • Wang, Chih-Hsiung

Abstract

In this study, we reformulated the problem of wafer probe operation in semiconductor manufacturing to consider a probe machine (PM) which has a discrete Weibull shift distribution with a nondecreasing failure rate. To maintain the imperfect PM during the probing of a lot of wafers, a minimal repair policy is introduced with type II inspection error. To increase the productivity of the PM, this paper aims to find an optimal probing lot size that minimizes the expected average processing time per wafer. Conditions and uniqueness for the optimal lot size are explored. The special case of a geometric shift distribution is studied to find a tighter upper bound on the optimal lot size than in previous study. Numerical examples are performed to evaluate the impacts of minimal repair on the optimal lot size. In addition, the adequacy of using a geometric shift distribution is examined when the actual shift distribution has an increasing failure rate.

Suggested Citation

  • Wang, Chih-Hsiung, 2009. "Determining the optimal probing lot size for the wafer probe operation in semiconductor manufacturing," European Journal of Operational Research, Elsevier, vol. 197(1), pages 126-133, August.
    • Handle: RePEc:eee:ejores:v:197:y:2009:i:1:p:126-133
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    References listed on IDEAS

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    1. Evan L. Porteus, 1986. "Optimal Lot Sizing, Process Quality Improvement and Setup Cost Reduction," Operations Research, INFORMS, vol. 34(1), pages 137-144, February.
    2. Wang, Chih-Hsiung & Sheu, Shey-Heui, 2003. "Optimal lot sizing for products sold under free-repair warranty," European Journal of Operational Research, Elsevier, vol. 149(1), pages 131-141, August.
    3. Yeh, Ruey Huei & Chen, Tzu-Hui, 2006. "Optimal lot size and inspection policy for products sold with warranty," European Journal of Operational Research, Elsevier, vol. 174(2), pages 766-776, October.
    4. Hau L. Lee, 1992. "Lot Sizing to Reduce Capacity Utilization in a Production Process with Defective Items, Process Corrections, and Rework," Management Science, INFORMS, vol. 38(9), pages 1314-1328, September.
    5. Djamaludin, I. & Murthy, D. N. P. & Wilson, R. J., 1994. "Quality control through lot sizing for items sold with warranty," International Journal of Production Economics, Elsevier, vol. 33(1-3), pages 97-107, January.
    6. Wang, Chih-Hsiung, 2005. "Integrated production and product inspection policy for a deteriorating production system," International Journal of Production Economics, Elsevier, vol. 95(1), pages 123-134, January.
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