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Alternative dielectrics to silicon dioxide for memory and logic devices

Author

Listed:
  • Angus I. Kingon

    (North Carolina State University)

  • Jon-Paul Maria

    (North Carolina State University)

  • S. K. Streiffer

    (Argonne National Laboratory)

Abstract

The silicon-based microelectronics industry is rapidly approaching a point where device fabrication can no longer be simply scaled to progressively smaller sizes. Technological decisions must now be made that will substantially alter the directions along which silicon devices continue to develop. One such challenge is the need for higher permittivity dielectrics to replace silicon dioxide, the properties of which have hitherto been instrumental to the industry's success. Considerable efforts have already been made to develop replacement dielectrics for dynamic random-access memories. These developments serve to illustrate the magnitude of the now urgent problem of identifying alternatives to silicon dioxide for the gate dielectric in logic devices, such as the ubiquitous field-effect transistor.

Suggested Citation

  • Angus I. Kingon & Jon-Paul Maria & S. K. Streiffer, 2000. "Alternative dielectrics to silicon dioxide for memory and logic devices," Nature, Nature, vol. 406(6799), pages 1032-1038, August.
    • Handle: RePEc:nat:nature:v:406:y:2000:i:6799:d:10.1038_35023243
    DOI: 10.1038/35023243
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    Cited by:

    1. Zheyi Lu & Yang Chen & Weiqi Dang & Lingan Kong & Quanyang Tao & Likuan Ma & Donglin Lu & Liting Liu & Wanying Li & Zhiwei Li & Xiao Liu & Yiliu Wang & Xidong Duan & Lei Liao & Yuan Liu, 2023. "Wafer-scale high-κ dielectrics for two-dimensional circuits via van der Waals integration," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    2. Kaldasch, Joachim, 2014. "Evolutionary Model of Moore’s Law," MPRA Paper 54397, University Library of Munich, Germany.
    3. Dan, Atasi & Barshilia, Harish C. & Chattopadhyay, Kamanio & Basu, Bikramjit, 2017. "Solar energy absorption mediated by surface plasma polaritons in spectrally selective dielectric-metal-dielectric coatings: A critical review," Renewable and Sustainable Energy Reviews, Elsevier, vol. 79(C), pages 1050-1077.

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