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All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition

Author

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  • Kristian Blindheim Lausund

    (Centre for Materials Science and Nanotechnology (SMN), University of Oslo, P.O. Box 1033 Blindern)

  • Ola Nilsen

    (Centre for Materials Science and Nanotechnology (SMN), University of Oslo, P.O. Box 1033 Blindern)

Abstract

Thin films of stable metal-organic frameworks (MOFs) such as UiO-66 have enormous application potential, for instance in microelectronics. However, all-gas-phase deposition techniques are currently not available for such MOFs. We here report on thin-film deposition of the thermally and chemically stable UiO-66 in an all-gas-phase process by the aid of atomic layer deposition (ALD). Sequential reactions of ZrCl4 and 1,4-benzenedicarboxylic acid produce amorphous organic–inorganic hybrid films that are subsequently crystallized to the UiO-66 structure by treatment in acetic acid vapour. We also introduce a new approach to control the stoichiometry between metal clusters and organic linkers by modulation of the ALD growth with additional acetic acid pulses. An all-gas-phase synthesis technique for UiO-66 could enable implementations in microelectronics that are not compatible with solvothermal synthesis. Since this technique is ALD-based, it could also give enhanced thickness control and the possibility to coat irregular substrates with high aspect ratios.

Suggested Citation

  • Kristian Blindheim Lausund & Ola Nilsen, 2016. "All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition," Nature Communications, Nature, vol. 7(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:7:y:2016:i:1:d:10.1038_ncomms13578
    DOI: 10.1038/ncomms13578
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    Cited by:

    1. Cheng, Yuan & Liu, Yao & Zhang, Junhua & Huang, Rulu & Wang, Yue & Cao, Shuwan & He, Liang & Peng, Lincai, 2022. "Acetic acid-regulated mesoporous zirconium-furandicarboxylate hybrid with high lewis acidity and lewis basicity for efficient conversion of furfural to furfuryl alcohol," Renewable Energy, Elsevier, vol. 184(C), pages 115-123.
    2. Minghui Liu & Youxing Liu & Jichen Dong & Yichao Bai & Wenqiang Gao & Shengcong Shang & Xinyu Wang & Junhua Kuang & Changsheng Du & Ye Zou & Jianyi Chen & Yunqi Liu, 2022. "Two-dimensional covalent organic framework films prepared on various substrates through vapor induced conversion," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    3. Wang, Yue & Liu, Huai & Zhang, Junhua & Cheng, Yuan & Lin, Wansi & Huang, Rulu & Peng, Lincai, 2022. "Direct epitaxial synthesis of magnetic biomass derived acid/base bifunctional zirconium-based hybrid for catalytic transfer hydrogenation of ethyl levulinate into γ-valerolactone," Renewable Energy, Elsevier, vol. 197(C), pages 911-921.

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