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Chip-scale sensor for spectroscopic metrology

Author

Listed:
  • Chunhui Yao

    (University of Cambridge
    GlitterinTech Limited)

  • Wanlu Zhang

    (University of Cambridge)

  • Peng Bao

    (University of Cambridge)

  • Jie Ma

    (GlitterinTech Limited)

  • Wei Zhuo

    (GlitterinTech Limited)

  • Minjia Chen

    (University of Cambridge)

  • Zhitian Shi

    (University of Cambridge)

  • Jingwen Zhou

    (GlitterinTech Limited)

  • Yuxiao Ye

    (GlitterinTech Limited)

  • Liang Ming

    (GlitterinTech Limited)

  • Ting Yan

    (GlitterinTech Limited)

  • Richard Penty

    (University of Cambridge)

  • Qixiang Cheng

    (University of Cambridge
    GlitterinTech Limited)

Abstract

Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.

Suggested Citation

  • Chunhui Yao & Wanlu Zhang & Peng Bao & Jie Ma & Wei Zhuo & Minjia Chen & Zhitian Shi & Jingwen Zhou & Yuxiao Ye & Liang Ming & Ting Yan & Richard Penty & Qixiang Cheng, 2024. "Chip-scale sensor for spectroscopic metrology," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-54708-x
    DOI: 10.1038/s41467-024-54708-x
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    References listed on IDEAS

    as
    1. Mario C. M. M. Souza & Andrew Grieco & Newton C. Frateschi & Yeshaiahu Fainman, 2018. "Fourier transform spectrometer on silicon with thermo-optic non-linearity and dispersion correction," Nature Communications, Nature, vol. 9(1), pages 1-8, December.
    2. Chunhui Yao & Kangning Xu & Wanlu Zhang & Minjia Chen & Qixiang Cheng & Richard Penty, 2023. "Integrated reconstructive spectrometer with programmable photonic circuits," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
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