IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v15y2024i1d10.1038_s41467-024-49303-z.html
   My bibliography  Save this article

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

Author

Listed:
  • Rana Asgari Sabet

    (Bilkent University
    Bilkent University)

  • Aqiq Ishraq

    (Bilkent University)

  • Alperen Saltik

    (Bilkent University)

  • Mehmet Bütün

    (Bilkent University)

  • Onur Tokel

    (Bilkent University
    Bilkent University)

Abstract

Nanofabrication in silicon, arguably the most important material for modern technology, has been limited exclusively to its surface. Existing lithography methods cannot penetrate the wafer surface without altering it, whereas emerging laser-based subsurface or in-chip fabrication remains at greater than 1 μm resolution. In addition, available methods do not allow positioning or modulation with sub-micron precision deep inside the wafer. The fundamental difficulty of breaking these dimensional barriers is two-fold, i.e., complex nonlinear effects inside the wafer and the inherent diffraction limit for laser light. Here, we overcome these challenges by exploiting spatially-modulated laser beams and anisotropic feedback from preformed subsurface structures, to establish controlled nanofabrication capability inside silicon. We demonstrate buried nanostructures of feature sizes down to 100 ± 20 nm, with subwavelength and multi-dimensional control; thereby improving the state-of-the-art by an order-of-magnitude. In order to showcase the emerging capabilities, we fabricate nanophotonics elements deep inside Si, exemplified by nanogratings with record diffraction efficiency and spectral control. The reported advance is an important step towards 3D nanophotonics systems, micro/nanofluidics, and 3D electronic-photonic integrated systems.

Suggested Citation

  • Rana Asgari Sabet & Aqiq Ishraq & Alperen Saltik & Mehmet Bütün & Onur Tokel, 2024. "Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
  • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-49303-z
    DOI: 10.1038/s41467-024-49303-z
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-024-49303-z
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-024-49303-z?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Stephen Y. Chou & Chris Keimel & Jian Gu, 2002. "Ultrafast and direct imprint of nanostructures in silicon," Nature, Nature, vol. 417(6891), pages 835-837, June.
    2. Can Kerse & Hamit Kalaycıoğlu & Parviz Elahi & Barbaros Çetin & Denizhan K. Kesim & Önder Akçaalan & Seydi Yavaş & Mehmet D. Aşık & Bülent Öktem & Heinar Hoogland & Ronald Holzwarth & Fatih Ömer Ilday, 2016. "Ablation-cooled material removal with ultrafast bursts of pulses," Nature, Nature, vol. 537(7618), pages 84-88, September.
    3. Pavel Cheben & Robert Halir & Jens H. Schmid & Harry A. Atwater & David R. Smith, 2018. "Subwavelength integrated photonics," Nature, Nature, vol. 560(7720), pages 565-572, August.
    4. Xiaoyi Xu & Tianxin Wang & Pengcheng Chen & Chao Zhou & Jianan Ma & Dunzhao Wei & Huijun Wang & Ben Niu & Xinyuan Fang & Di Wu & Shining Zhu & Min Gu & Min Xiao & Yong Zhang, 2022. "Femtosecond laser writing of lithium niobate ferroelectric nanodomains," Nature, Nature, vol. 609(7927), pages 496-501, September.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Gyujin Park & Changhee Lee, 2019. "Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment," Sustainability, MDPI, vol. 11(17), pages 1-27, September.
    2. Xiang-Dong Chen & En-Hui Wang & Long-Kun Shan & Ce Feng & Yu Zheng & Yang Dong & Guang-Can Guo & Fang-Wen Sun, 2021. "Focusing the electromagnetic field to 10−6λ for ultra-high enhancement of field-matter interaction," Nature Communications, Nature, vol. 12(1), pages 1-7, December.
    3. Takuya Inoue & Ryohei Morita & Kazuki Nigo & Masahiro Yoshida & Menaka Zoysa & Kenji Ishizaki & Susumu Noda, 2023. "Self-evolving photonic crystals for ultrafast photonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    4. Kun Wang & Jianwei Shi & Wenxuan Lai & Qiang He & Jun Xu & Zhenyi Ni & Xinfeng Liu & Xiaodong Pi & Deren Yang, 2024. "All-silicon multidimensionally-encoded optical physical unclonable functions for integrated circuit anti-counterfeiting," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    5. Pengcheng Chen & Xiaoyi Xu & Tianxin Wang & Chao Zhou & Dunzhao Wei & Jianan Ma & Junjie Guo & Xuejing Cui & Xiaoyan Cheng & Chenzhu Xie & Shuang Zhang & Shining Zhu & Min Xiao & Yong Zhang, 2023. "Laser nanoprinting of 3D nonlinear holograms beyond 25000 pixels-per-inch for inter-wavelength-band information processing," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    6. Jin-Tao Pan & Bo-Han Zhu & Ling-Ling Ma & Wei Chen & Guang-Yang Zhang & Jie Tang & Yuan Liu & Yang Wei & Chao Zhang & Zhi-Han Zhu & Wen-Guo Zhu & Guixin Li & Yan-Qing Lu & Noel A. Clark, 2024. "Nonlinear geometric phase coded ferroelectric nematic fluids for nonlinear soft-matter photonics," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    7. Junting Liu & Fang Yang & Junpeng Lu & Shuai Ye & Haowen Guo & Hongkun Nie & Jialin Zhang & Jingliang He & Baitao Zhang & Zhenhua Ni, 2022. "High output mode-locked laser empowered by defect regulation in 2D Bi2O2Se saturable absorber," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    8. Yinan Zhang & Shengting Zhu & Jinming Hu & Min Gu, 2024. "Femtosecond laser direct nanolithography of perovskite hydration for temporally programmable holograms," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    9. Qiaomei Liu & Dong Wu & Tianyi Wu & Shanshan Han & Yiran Peng & Zhihong Yuan & Yihan Cheng & Bohan Li & Tianchen Hu & Li Yue & Shuxiang Xu & Ruoxuan Ding & Ming Lu & Rongsheng Li & Sijie Zhang & Baiqi, 2024. "Room-temperature non-volatile optical manipulation of polar order in a charge density wave," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    10. John A. Tomko & Michael J. Johnson & David R. Boris & Tzvetelina B. Petrova & Scott G. Walton & Patrick E. Hopkins, 2022. "Plasma-induced surface cooling," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    11. Yanze Feng & Runkun Chen & Junbo He & Liujian Qi & Yanan Zhang & Tian Sun & Xudan Zhu & Weiming Liu & Weiliang Ma & Wanfu Shen & Chunguang Hu & Xiaojuan Sun & Dabing Li & Rongjun Zhang & Peining Li & , 2023. "Visible to mid-infrared giant in-plane optical anisotropy in ternary van der Waals crystals," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-49303-z. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.