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Crystallization of piezoceramic films on glass via flash lamp annealing

Author

Listed:
  • Longfei Song

    (Luxembourg Institute of Science and Technology
    University of Luxembourg)

  • Juliette Cardoletti

    (Luxembourg Institute of Science and Technology)

  • Alfredo Blázquez Martínez

    (Luxembourg Institute of Science and Technology
    University of Luxembourg)

  • Andreja Benčan

    (Jožef Stefan Institute)

  • Brigita Kmet

    (Jožef Stefan Institute)

  • Stéphanie Girod

    (Luxembourg Institute of Science and Technology)

  • Emmanuel Defay

    (Luxembourg Institute of Science and Technology)

  • Sebastjan Glinšek

    (Luxembourg Institute of Science and Technology)

Abstract

Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 °C) is incompatible with most glasses. We developed a flash lamp process for the growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. The functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 °C. A surface haptic device was fabricated with a 1 μm-thick film (piezoelectric e33,f of −5 C m−2). Its ultrasonic surface deflection reached 1.5 μm at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass.

Suggested Citation

  • Longfei Song & Juliette Cardoletti & Alfredo Blázquez Martínez & Andreja Benčan & Brigita Kmet & Stéphanie Girod & Emmanuel Defay & Sebastjan Glinšek, 2024. "Crystallization of piezoceramic films on glass via flash lamp annealing," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-46257-0
    DOI: 10.1038/s41467-024-46257-0
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    1. Kalaivanan Loganathan & Hendrik Faber & Emre Yengel & Akmaral Seitkhan & Azamat Bakytbekov & Emre Yarali & Begimai Adilbekova & Afnan AlBatati & Yuanbao Lin & Zainab Felemban & Shuai Yang & Weiwei Li , 2022. "Rapid and up-scalable manufacturing of gigahertz nanogap diodes," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
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