EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning
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DOI: 10.1038/s41467-024-44790-6
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- M. Kiczynski & S. K. Gorman & H. Geng & M. B. Donnelly & Y. Chung & Y. He & J. G. Keizer & M. Y. Simmons, 2022. "Engineering topological states in atom-based semiconductor quantum dots," Nature, Nature, vol. 606(7915), pages 694-699, June.
- B. E. Kane, 1998. "A silicon-based nuclear spin quantum computer," Nature, Nature, vol. 393(6681), pages 133-137, May.
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