IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v13y2022i1d10.1038_s41467-022-28050-z.html
   My bibliography  Save this article

Solvent-free bottom-up patterning of zeolitic imidazolate frameworks

Author

Listed:
  • Yurun Miao

    (Johns Hopkins University)

  • Dennis T. Lee

    (Johns Hopkins University)

  • Matheus Dorneles Mello

    (Brookhaven National Laboratory
    University of Delaware)

  • Mueed Ahmad

    (Brookhaven National Laboratory
    Stony Brook University)

  • Mohammed K. Abdel-Rahman

    (Johns Hopkins University)

  • Patrick M. Eckhert

    (Johns Hopkins University)

  • J. Anibal Boscoboinik

    (Brookhaven National Laboratory
    Stony Brook University)

  • D. Howard Fairbrother

    (Johns Hopkins University)

  • Michael Tsapatsis

    (Johns Hopkins University
    Johns Hopkins University)

Abstract

Patterning metal-organic frameworks (MOFs) at submicrometer scale is a crucial yet challenging task for their integration in miniaturized devices. Here we report an electron beam (e-beam) assisted, bottom-up approach for patterning of two MOFs, zeolitic imidazolate frameworks (ZIF), ZIF-8 and ZIF-67. A mild pretreatment of metal oxide precursors with linker vapor leads to the sensitization of the oxide surface to e-beam irradiation, effectively inhibiting subsequent conversion of the oxide to ZIFs in irradiated areas, while ZIF growth in non-irradiated areas is not affected. Well-resolved patterns with features down to the scale of 100 nm can be achieved. This developer-free, all-vapor phase technique will facilitate the incorporation of MOFs in micro- and nanofabrication processes.

Suggested Citation

  • Yurun Miao & Dennis T. Lee & Matheus Dorneles Mello & Mueed Ahmad & Mohammed K. Abdel-Rahman & Patrick M. Eckhert & J. Anibal Boscoboinik & D. Howard Fairbrother & Michael Tsapatsis, 2022. "Solvent-free bottom-up patterning of zeolitic imidazolate frameworks," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
  • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-28050-z
    DOI: 10.1038/s41467-022-28050-z
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-022-28050-z
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-022-28050-z?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Youyou Lu & Xuan Zhang & Liyan Zhao & Hong Liu & Mi Yan & Xiaochen Zhang & Kenji Mochizuki & Shikuan Yang, 2023. "Metal-organic framework template-guided electrochemical lithography on substrates for SERS sensing applications," Nature Communications, Nature, vol. 14(1), pages 1-12, December.
    2. Xiaoli Tian & Fu Li & Zhenyuan Tang & Song Wang & Kangkang Weng & Dan Liu & Shaoyong Lu & Wangyu Liu & Zhong Fu & Wenjun Li & Hengwei Qiu & Min Tu & Hao Zhang & Jinghong Li, 2024. "Crosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography," Nature Communications, Nature, vol. 15(1), pages 1-15, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-28050-z. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.