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Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems

Author

Listed:
  • Jun Kyu Park

    (University of Illinois at Urbana-Champaign)

  • Yue Zhang

    (University of Virginia)

  • Baoxing Xu

    (University of Virginia)

  • Seok Kim

    (University of Illinois at Urbana-Champaign
    Yonsei University
    Pohang University of Science and Technology (POSTECH))

Abstract

Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. We present, in combined theory and experiment, a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in liquid media. This pattern transfer allows the usage of an intermediate or mediator substrate where both front and back sides of a thin membrane are capable of being integrated with standard lithographical processing, thereby achieving deterministic assembly of the thin membrane into a multi-functional system. Implementations of these capabilities are demonstrated in broad variety of applications ranging from electronics to microelectromechanical systems, wetting and filtration, and metamaterials.

Suggested Citation

  • Jun Kyu Park & Yue Zhang & Baoxing Xu & Seok Kim, 2021. "Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-27208-5
    DOI: 10.1038/s41467-021-27208-5
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    References listed on IDEAS

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    1. Paul Hauseux & Thanh-Tung Nguyen & Alberto Ambrosetti & Katerine Saleme Ruiz & Stéphane P. A. Bordas & Alexandre Tkatchenko, 2020. "From quantum to continuum mechanics in the delamination of atomically-thin layers from substrates," Nature Communications, Nature, vol. 11(1), pages 1-8, December.
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