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Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

Author

Listed:
  • Sebastian Heedt

    (Delft University of Technology
    Microsoft Quantum Lab Delft)

  • Marina Quintero-Pérez

    (Microsoft Quantum Lab Delft)

  • Francesco Borsoi

    (Delft University of Technology)

  • Alexandra Fursina

    (Microsoft Quantum Lab Delft)

  • Nick Loo

    (Delft University of Technology)

  • Grzegorz P. Mazur

    (Delft University of Technology)

  • Michał P. Nowak

    (AGH University of Science and Technology, Academic Centre for Materials and Nanotechnology)

  • Mark Ammerlaan

    (Delft University of Technology)

  • Kongyi Li

    (Delft University of Technology)

  • Svetlana Korneychuk

    (Delft University of Technology)

  • Jie Shen

    (Delft University of Technology)

  • May An Y. Poll

    (Delft University of Technology)

  • Ghada Badawy

    (Eindhoven University of Technology)

  • Sasa Gazibegovic

    (Eindhoven University of Technology)

  • Nick Jong

    (Delft University of Technology
    Netherlands Organisation for Applied Scientific Research (TNO))

  • Pavel Aseev

    (Microsoft Quantum Lab Delft)

  • Kevin Hoogdalem

    (Microsoft Quantum Lab Delft)

  • Erik P. A. M. Bakkers

    (Eindhoven University of Technology)

  • Leo P. Kouwenhoven

    (Delft University of Technology
    Microsoft Quantum Lab Delft)

Abstract

The realization of hybrid superconductor–semiconductor quantum devices, in particular a topological qubit, calls for advanced techniques to readily and reproducibly engineer induced superconductivity in semiconductor nanowires. Here, we introduce an on-chip fabrication paradigm based on shadow walls that offers substantial advances in device quality and reproducibility. It allows for the implementation of hybrid quantum devices and ultimately topological qubits while eliminating fabrication steps such as lithography and etching. This is critical to preserve the integrity and homogeneity of the fragile hybrid interfaces. The approach simplifies the reproducible fabrication of devices with a hard induced superconducting gap and ballistic normal-/superconductor junctions. Large gate-tunable supercurrents and high-order multiple Andreev reflections manifest the exceptional coherence of the resulting nanowire Josephson junctions. Our approach enables the realization of 3-terminal devices, where zero-bias conductance peaks emerge in a magnetic field concurrently at both boundaries of the one-dimensional hybrids.

Suggested Citation

  • Sebastian Heedt & Marina Quintero-Pérez & Francesco Borsoi & Alexandra Fursina & Nick Loo & Grzegorz P. Mazur & Michał P. Nowak & Mark Ammerlaan & Kongyi Li & Svetlana Korneychuk & Jie Shen & May An Y, 2021. "Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices," Nature Communications, Nature, vol. 12(1), pages 1-9, December.
  • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-25100-w
    DOI: 10.1038/s41467-021-25100-w
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    Citations

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    Cited by:

    1. Vukan Levajac & Ji-Yin Wang & Cristina Sfiligoj & Mathilde Lemang & Jan Cornelis Wolff & Alberto Bordin & Ghada Badawy & Sasa Gazibegovic & Erik P. A. M. Bakkers & Leo P. Kouwenhoven, 2023. "Subgap spectroscopy along hybrid nanowires by nm-thick tunnel barriers," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    2. A. Ibabe & M. Gómez & G. O. Steffensen & T. Kanne & J. Nygård & A. Levy Yeyati & E. J. H. Lee, 2023. "Joule spectroscopy of hybrid superconductor–semiconductor nanodevices," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    3. Nick Loo & Grzegorz P. Mazur & Tom Dvir & Guanzhong Wang & Robin C. Dekker & Ji-Yin Wang & Mathilde Lemang & Cristina Sfiligoj & Alberto Bordin & David Driel & Ghada Badawy & Sasa Gazibegovic & Erik P, 2023. "Electrostatic control of the proximity effect in the bulk of semiconductor-superconductor hybrids," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    4. David Driel & Guanzhong Wang & Alberto Bordin & Nick Loo & Francesco Zatelli & Grzegorz P. Mazur & Di Xu & Sasa Gazibegovic & Ghada Badawy & Erik P. A. M. Bakkers & Leo P. Kouwenhoven & Tom Dvir, 2023. "Spin-filtered measurements of Andreev bound states in semiconductor-superconductor nanowire devices," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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