IDEAS home Printed from https://ideas.repec.org/a/ids/eujine/v5y2011i3p338-359.html
   My bibliography  Save this article

Optimisation approaches for batch scheduling in semiconductor manufacturing

Author

Listed:
  • Andreas Klemmt
  • Gerald Weigert
  • Sebastian Werner

Abstract

In this research, several approaches for the optimisation of batch processes are investigated and compared. The motivation for this is the analysis of an oven work centre in a semiconductor wafer fab. Different objectives like keeping operational due dates as well as the minimisation of lot completion time will be optimised with regard to existing process constraints. First, the problem is modelled from two different viewpoints: as scheduling problem and with the help of a simulation system. For this, it used mixed integer programming (MIP) and a discrete event simulation system respectively. As a next step, a MIP time window decomposition approach combining simulation and mathematical programming is discussed. This reduces the complexity of the given problem by solving local sub-problems. Experiments on real manufacturing data determine the optimisation potential for the work centre using the different approaches. This allows, among others, a comparison to dispatching strategies as they are used in the manufacturing line. [Received: 01 July 2009; Revised: 09 November 2009; Accepted: 01 February 2010].

Suggested Citation

  • Andreas Klemmt & Gerald Weigert & Sebastian Werner, 2011. "Optimisation approaches for batch scheduling in semiconductor manufacturing," European Journal of Industrial Engineering, Inderscience Enterprises Ltd, vol. 5(3), pages 338-359.
    • Handle: RePEc:ids:eujine:v:5:y:2011:i:3:p:338-359
    as

    Download full text from publisher

    File URL: http://www.inderscience.com/link.php?id=41621
    Download Restriction: Access to full text is restricted to subscribers.
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Fowler, John W. & Mönch, Lars, 2022. "A survey of scheduling with parallel batch (p-batch) processing," European Journal of Operational Research, Elsevier, vol. 298(1), pages 1-24.
    2. Ying-Mei Tu, 2021. "Short-Term Scheduling Model of Cluster Tool in Wafer Fabrication," Mathematics, MDPI, vol. 9(9), pages 1-13, May.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:ids:eujine:v:5:y:2011:i:3:p:338-359. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sarah Parker (email available below). General contact details of provider: http://www.inderscience.com/browse/index.php?journalID=210 .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.