Short-Term Scheduling Model of Cluster Tool in Wafer Fabrication
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References listed on IDEAS
- Andreas Klemmt & Gerald Weigert & Sebastian Werner, 2011. "Optimisation approaches for batch scheduling in semiconductor manufacturing," European Journal of Industrial Engineering, Inderscience Enterprises Ltd, vol. 5(3), pages 338-359.
- Chandra Sen Mazumdar & M. Mathirajan & R. Gopinath & A.I. Sivakumar, 2008. "Tabu Search methods for scheduling a burn-in oven with non-identical job sizes and secondary resource constraints," International Journal of Operational Research, Inderscience Enterprises Ltd, vol. 3(1/2), pages 119-139.
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- Mario Versaci, 2022. "Preface to the Special Issue “Mathematical Modeling in Industrial Engineering and Electrical Engineering”—Special Issue Book," Mathematics, MDPI, vol. 10(21), pages 1-5, October.
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Keywords
wafer fabrication; cluster tool; short term scheduling; dynamic cycle time;All these keywords.
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