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Design and Comparison of Resonant and Non-Resonant Single-Layer Microwave Heaters for Continuous Flow Microfluidics in Silicon-Glass Technology

Author

Listed:
  • Tomislav Markovic

    (IOT Group, imec, Kapeldreef 75, 3001 Heverlee, Belgium
    Division TELEMIC, Department of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, 3001 Leuven, Belgium)

  • Ilja Ocket

    (IOT Group, imec, Kapeldreef 75, 3001 Heverlee, Belgium
    Division TELEMIC, Department of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, 3001 Leuven, Belgium)

  • Adrijan Baric

    (Department of Electronics, Microelectronics, Computer and Intelligent Systems, Faculty of Electrical Engineering and Computing, University of Zagreb, Unska 3, 10000 Zagreb, Croatia)

  • Bart Nauwelaers

    (Division TELEMIC, Department of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, 3001 Leuven, Belgium)

Abstract

This paper presents a novel concept for the co-design of microwave heaters and microfluidic channels for sub-microliter volumes in continuous flow microfluidics. Based on the novel co-design concept, two types of heaters are presented, co-designed and manufactured in high-resistivity silicon-glass technology, resulting in a building block for consumable and mass-producible micro total analysis systems. Resonant and non-resonant co-planar waveguide transmission line heaters are investigated for heating of sub-micro-liter liquid volumes in a channel section at 25 GHz. The heating rates of 16 and 24 °C/s are obtained with power levels of 32 dBm for the through line and the open-ended line microwave heater, respectively. The heating uniformity of developed devices is evaluated with a Rhodamine B and deionized water mixture on a micrometer scale using the microwave-optical measurement setup. Measurement results showed a good agreement with simulations and demonstrated the potential of microwave heating for microfluidics.

Suggested Citation

  • Tomislav Markovic & Ilja Ocket & Adrijan Baric & Bart Nauwelaers, 2020. "Design and Comparison of Resonant and Non-Resonant Single-Layer Microwave Heaters for Continuous Flow Microfluidics in Silicon-Glass Technology," Energies, MDPI, vol. 13(10), pages 1-13, May.
    • Handle: RePEc:gam:jeners:v:13:y:2020:i:10:p:2635-:d:361365
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    Citations

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    Cited by:

    1. Li Lei & Yuting Zhao & Wukai Chen & Huiling Li & Xinyu Wang & Jingzhi Zhang, 2021. "Experimental Studies of Droplet Formation Process and Length for Liquid–Liquid Two-Phase Flows in a Microchannel," Energies, MDPI, vol. 14(5), pages 1-17, March.
    2. Laura Jasińska & Krzysztof Szostak & Mateusz Czok & Karol Malecha & Piotr Słobodzian, 2021. "A Stripline-Based Integrated Microfluidic-Microwave Module," Energies, MDPI, vol. 14(9), pages 1-10, April.
    3. Yang, Huayu & Yan, Bowen & Chen, Wei & Fan, Daming, 2023. "Prediction and innovation of sustainable continuous flow microwave processing based on numerical simulations: A systematic review," Renewable and Sustainable Energy Reviews, Elsevier, vol. 175(C).

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