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Capacity planning for cluster tools in the semiconductor industry

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  • Romauch, Martin
  • Hartl, Richard F.

Abstract

This paper proposes a new model for cluster tools with two load locks. Cluster tools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the cluster tool’s mainframe. Usually there are two of them available. Each lot being processed is dedicated to a single load-lock. Therefore at most two different lots (with possibly different processing times and qualification) can be processed simultaneously. This restriction is one of the major potential bottlenecks.

Suggested Citation

  • Romauch, Martin & Hartl, Richard F., 2017. "Capacity planning for cluster tools in the semiconductor industry," International Journal of Production Economics, Elsevier, vol. 194(C), pages 167-180.
    • Handle: RePEc:eee:proeco:v:194:y:2017:i:c:p:167-180
    DOI: 10.1016/j.ijpe.2017.01.005
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    References listed on IDEAS

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    1. Swaminathan, Jayashankar M., 2000. "Tool capacity planning for semiconductor fabrication facilities under demand uncertainty," European Journal of Operational Research, Elsevier, vol. 120(3), pages 545-558, February.
    2. Christian Almeder & Margaretha Preusser & Richard F. Hartl, 2009. "Simulation and optimization of supply chains: alternative or complementary approaches?," Springer Books, in: Herbert Meyr & Hans-Otto Günther (ed.), Supply Chain Planning, pages 29-53, Springer.
    3. Gale, David, 1989. "The Theory of Linear Economic Models," University of Chicago Press Economics Books, University of Chicago Press, edition 1, number 9780226278841.
    4. Thiesse, Frédéric & Fleisch, Elgar, 2008. "On the value of location information to lot scheduling in complex manufacturing processes," International Journal of Production Economics, Elsevier, vol. 112(2), pages 532-547, April.
    5. Stuart Bermon & Sarah Jean Hood, 1999. "Capacity Optimization Planning System (CAPS)," Interfaces, INFORMS, vol. 29(5), pages 31-50, October.
    6. Ogryczak, Wlodzimierz, 1997. "On the lexicographic minimax approach to location problems," European Journal of Operational Research, Elsevier, vol. 100(3), pages 566-585, August.
    7. Gansterer, Margaretha & Almeder, Christian & Hartl, Richard F., 2014. "Simulation-based optimization methods for setting production planning parameters," International Journal of Production Economics, Elsevier, vol. 151(C), pages 206-213.
    8. Juan, Angel A. & Faulin, Javier & Grasman, Scott E. & Rabe, Markus & Figueira, Gonçalo, 2015. "A review of simheuristics: Extending metaheuristics to deal with stochastic combinatorial optimization problems," Operations Research Perspectives, Elsevier, vol. 2(C), pages 62-72.
    9. Martínez-Costa, Carme & Mas-Machuca, Marta & Benedito, Ernest & Corominas, Albert, 2014. "A review of mathematical programming models for strategic capacity planning in manufacturing," International Journal of Production Economics, Elsevier, vol. 153(C), pages 66-85.
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    Cited by:

    1. Fengyi Lin & Sheng-Wei Lin & Wen-Min Lu, 2018. "Sustainability Assessment of Taiwan’s Semiconductor Industry: A New Hybrid Model Using Combined Analytic Hierarchy Process and Two-Stage Additive Network Data Envelopment Analysis," Sustainability, MDPI, vol. 10(11), pages 1-16, November.

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