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Capacity planning for cluster tools in the semiconductor industry

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  • Romauch, Martin
  • Hartl, Richard F.

Abstract

This paper proposes a new model for cluster tools with two load locks. Cluster tools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the cluster tool’s mainframe. Usually there are two of them available. Each lot being processed is dedicated to a single load-lock. Therefore at most two different lots (with possibly different processing times and qualification) can be processed simultaneously. This restriction is one of the major potential bottlenecks.

Suggested Citation

  • Romauch, Martin & Hartl, Richard F., 2017. "Capacity planning for cluster tools in the semiconductor industry," International Journal of Production Economics, Elsevier, vol. 194(C), pages 167-180.
    • Handle: RePEc:eee:proeco:v:194:y:2017:i:c:p:167-180
    DOI: 10.1016/j.ijpe.2017.01.005
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    References listed on IDEAS

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    Cited by:

    1. Fengyi Lin & Sheng-Wei Lin & Wen-Min Lu, 2018. "Sustainability Assessment of Taiwan’s Semiconductor Industry: A New Hybrid Model Using Combined Analytic Hierarchy Process and Two-Stage Additive Network Data Envelopment Analysis," Sustainability, MDPI, vol. 10(11), pages 1-16, November.

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