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Evaluation of the ventilation mode in an ISO class 6 electronic cleanroom by the AHP-entropy weight method

Author

Listed:
  • Han, Gang
  • Feng, Guozeng
  • Tang, Chunli
  • Pan, Chongyao
  • Zhou, Weiming
  • Zhu, Jintang

Abstract

As ISO Class 6 electronic cleanrooms are required to meet stringent environmental control standards during production, an energy-efficient ventilation mode is required to maintain an appropriate thermal and humidity environment and a comfortable workplace. However, the optimum air supply distribution to ensure thermal comfort, energy efficiency and cleanliness is unclear. Therefore, numerical simulations were carried out to determine the workspace satisfaction, energy utilization coefficient satisfaction and contaminant-removal satisfaction with FFU-clean bench coverage(C) ranging from 25% to 100%. We use the AHP-entropy weight method to evaluate four different ventilation modes for different cleanroom design targets, and then select suitable ventilation modes to meet them. The results show that in the core work area, the temperature difference, relative humidity difference and air velocity difference increase with increasing coverage. Furthermore, when the C = 25%, the priority of thermal comfort and cleanliness of employees is satisfied. Moreover, when C = 50%, high energy efficiency of the ventilation system is achieved. The AHP-entropy weight method evaluation system provides a theoretical basis for the selection of cleanroom ventilation design solutions.

Suggested Citation

  • Han, Gang & Feng, Guozeng & Tang, Chunli & Pan, Chongyao & Zhou, Weiming & Zhu, Jintang, 2023. "Evaluation of the ventilation mode in an ISO class 6 electronic cleanroom by the AHP-entropy weight method," Energy, Elsevier, vol. 284(C).
    • Handle: RePEc:eee:energy:v:284:y:2023:i:c:s0360544223019801
    DOI: 10.1016/j.energy.2023.128586
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    References listed on IDEAS

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    1. Zhang, Sheng & Cheng, Yong & Oladokun, Majeed Olaide & Huan, Chao & Lin, Zhang, 2019. "Heat removal efficiency of stratum ventilation for air-side modulation," Applied Energy, Elsevier, vol. 238(C), pages 1237-1249.
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