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Bottleneck Detection Method Based on Production Line Information for Semiconductor Manufacturing System

In: The 19th International Conference on Industrial Engineering and Engineering Management

Author

Listed:
  • Xiao-yu Yu

    (TongJi University)

  • Fei Qiao

    (TongJi University)

  • Yu-min Ma

    (TongJi University)

Abstract

Semiconductor wafer fabrication system is a typical complex manufacturing system, since it has large-scale, reentrant, multi-objective, uncertain and other characteristics. It’s too difficult to achieve the capacity balance to lead the existence of the bottleneck. According to the theory of TOC, the accurate detection of bottleneck is the key to implement DBR thought. For the characteristics of semiconductor production line, this paper proposes a bottleneck detection method based on the starvation and blockage information of the production line. The method is verified on HP-24 model by simulation. Compared to the relative load method, the equipment utilization law and the queue length method; the experimental results show that this method makes performance better than them.

Suggested Citation

  • Xiao-yu Yu & Fei Qiao & Yu-min Ma, 2013. "Bottleneck Detection Method Based on Production Line Information for Semiconductor Manufacturing System," Springer Books, in: Ershi Qi & Jiang Shen & Runliang Dou (ed.), The 19th International Conference on Industrial Engineering and Engineering Management, edition 127, chapter 0, pages 209-218, Springer.
    • Handle: RePEc:spr:sprchp:978-3-642-38391-5_22
    DOI: 10.1007/978-3-642-38391-5_22
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