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Semiconductor Manufacturing Scheduling and Dispatching

In: Handbook of Production Scheduling

Author

Listed:
  • Michele E. Pfund

    (Arizona State University
    University of Arkansas)

  • Scott J. Mason

    (Arizona State University
    University of Arkansas)

  • John W. Fowler

    (Arizona State University
    University of Arkansas)

Abstract

This chapter discusses scheduling and dispatching in one of the most complex manufacturing environments — wafer fabrication facilities. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.

Suggested Citation

  • Michele E. Pfund & Scott J. Mason & John W. Fowler, 2006. "Semiconductor Manufacturing Scheduling and Dispatching," International Series in Operations Research & Management Science, in: Jeffrey W. Herrmann (ed.), Handbook of Production Scheduling, pages 213-241, Springer.
    • Handle: RePEc:spr:isochp:978-0-387-33117-1_9
    DOI: 10.1007/0-387-33117-4_9
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    Cited by:

    1. Pickardt, Christoph W. & Hildebrandt, Torsten & Branke, Jürgen & Heger, Jens & Scholz-Reiter, Bernd, 2013. "Evolutionary generation of dispatching rule sets for complex dynamic scheduling problems," International Journal of Production Economics, Elsevier, vol. 145(1), pages 67-77.

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