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The Study On The O2 Plasma Treatment For Bonding Of Su-8 Layers

Author

Listed:
  • XUE YANG

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • XINYAN JIANG

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • ZHIFU YIN

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • DONG F. WANG

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • TENGFEI YU

    (#x2020;Tangshan Research Institute Co., Ltd., China Coal Science and Engineering Group, Tangshan 063012, P. R. China)

  • LEI SUN

    (#x2021;Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China)

  • HELIN ZOU

    (#x2021;Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China)

Abstract

SU-8 is becoming increasingly important for fabrication of lab-on-a-chip devices due to its excellent chemical stability, mechanical, and optical properties. To form a complete SU-8 device, O2 plasma-assisted thermal bonding has been used to bond SU-8 layers. O2 plasma treatment is critical and has a significant influence on the fabrication quality of SU-8 devices. However, to the best of our knowledge, there is no work which analyzed O2 plasma treating process for SU-8 material in depth and systematically. In this study, the influence of O2 plasma treatment on the water contact angle and bonding strength for both un-crosslinked and crosslinked SU-8 layer was investigated in detail. The etching effect of SU-8 layer was also studied. The leakage test demonstrated that there is no gas leakage in the bonded SU-8 layer up to 0.65Mpa which indicates the practicability of the proposed SU-8 bonding method.

Suggested Citation

  • Xue Yang & Xinyan Jiang & Zhifu Yin & Dong F. Wang & Tengfei Yu & Lei Sun & Helin Zou, 2020. "The Study On The O2 Plasma Treatment For Bonding Of Su-8 Layers," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 27(03), pages 1-9, March.
    • Handle: RePEc:wsi:srlxxx:v:27:y:2020:i:03:n:s0218625x19501191
    DOI: 10.1142/S0218625X19501191
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    More about this item

    Keywords

    SU-8; thermal bonding; O2 plasma treatment; water contact angle;
    All these keywords.

    JEL classification:

    • O2 - Economic Development, Innovation, Technological Change, and Growth - - Development Planning and Policy

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