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Buckling Morphologies And Interfacial Properties Of Silicon Nitride Films Deposited On Float Glass Substrates

Author

Listed:
  • YA-DONG SUN

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • QI-XIANG CHEN

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • YU-FEI FENG

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

  • JUN CHEN

    (Zhejiang Zhongli Energy Efficiency Glass Manufacture Co., Ltd, Hangzhou 311228, P. R. China)

  • SEN-JIANG YU

    (Department of Physics, China Jiliang University, Hangzhou 310018, P. R. China)

Abstract

We report on the buckling morphologies and interfacial properties of silicon nitride films deposited on float glass substrates. The coexistence of straight-sided and telephone cord buckles can be observed in the silicon nitride films after annealing at a high temperature. The straight-sided structure is metastable and can spontaneously evolve into the telephone cord structure accompanied by the increase in the buckle width and height. The geometric parameters of various buckling structures (including the straight blister, telephone cord and their transition state) have been measured by optical microscopy and atomic force microscopy (AFM). The internal stress and interfacial adhesion of the films are evaluated and analyzed based on the continuum elastic theory. It is valid to measure the interfacial properties of thin films by simplifying the telephone cord buckle as a straight-sided structure. This measurement technique is suitable for all the film systems provided that the buckles can form in the film.

Suggested Citation

  • Ya-Dong Sun & Qi-Xiang Chen & Yu-Fei Feng & Jun Chen & Sen-Jiang Yu, 2015. "Buckling Morphologies And Interfacial Properties Of Silicon Nitride Films Deposited On Float Glass Substrates," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 22(04), pages 1-8.
    • Handle: RePEc:wsi:srlxxx:v:22:y:2015:i:04:n:s0218625x15500468
    DOI: 10.1142/S0218625X15500468
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    Cited by:

    1. Enze Wang & Zixin Xiong & Zekun Chen & Zeqin Xin & Huachun Ma & Hongtao Ren & Bolun Wang & Jing Guo & Yufei Sun & Xuewen Wang & Chenyu Li & Xiaoyan Li & Kai Liu, 2023. "Water nanolayer facilitated solitary-wave-like blisters in MoS2 thin films," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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