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FORMATION AND FIELD EMISSION CHARACTERISTICS OF AMORPHOUS AND CRYSTALLINESiNANOARRAYS

Author

Listed:
  • J. XU

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • W. LI

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • J. ZHOU

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • L. XU

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • Z. H. CEN

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • K. J. CHEN

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • F. Q. SONG

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • J. G. WAN

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

  • M. HAN

    (National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China)

Abstract

Highly ordered crystalline and amorphousSinanoarrays have been formed by using self-assembled monolayer of polystyrene nanospheres as a template followed by dry ion etching treatments. The template was removed by annealing at 8°C and pattern transfer process was revealed by atomic force microscopy. It was shown that the orderedSinanotips with a height about 70–80 nm and an average lateral size around 150 nm can be obtained. Field emission with low threshold electric field (

Suggested Citation

  • J. Xu & W. Li & J. Zhou & L. Xu & Z. H. Cen & K. J. Chen & F. Q. Song & J. G. Wan & M. Han, 2007. "FORMATION AND FIELD EMISSION CHARACTERISTICS OF AMORPHOUS AND CRYSTALLINESiNANOARRAYS," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(04), pages 543-546.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:04:n:s0218625x07009815
    DOI: 10.1142/S0218625X07009815
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    Keywords

    Si; field emission; nanoarray;
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