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Study Of A Bimaterial System By An Improved Dynamical Thermal Model

Author

Listed:
  • A. I. OLIVA

    (Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Depto. de Física Aplicada, Km. 6 Ant. Carr. Progreso, A.P. 73-Cordemex, 97310 Mérida Yucatán, México)

  • R. D. MALDONADO

    (Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Depto. de Física Aplicada, Km. 6 Ant. Carr. Progreso, A.P. 73-Cordemex, 97310 Mérida Yucatán, México)

  • O. CEH

    (Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Depto. de Física Aplicada, Km. 6 Ant. Carr. Progreso, A.P. 73-Cordemex, 97310 Mérida Yucatán, México)

  • J. E. CORONA

    (Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Depto. de Física Aplicada, Km. 6 Ant. Carr. Progreso, A.P. 73-Cordemex, 97310 Mérida Yucatán, México)

  • H. G. RIVEROS

    (Instituto de Física, UNAM, A.P. 20-364, 01000 México D.F., México)

Abstract

We present an improved dynamical thermal model and the corresponding experimental efforts to determine thermal profiles of thin metallic films deposited on thick substrates (bimaterial system) as are usually used in microelectronics. A dynamical thermal model to characterize the Joule heating of a metallic film/substrate system, as a function of the applied energy and the thickness is discussed. Good agreement between theoretical and measured thermal profiles on different bimaterial systems support the theoretical model obtained by solving a harmonic oscillator equation. By combining the thermal model and the experimental results it is possible to determine the convective coefficient of the room conditions, the diffusive time constant, and to quantify the different mechanisms of heat loss as a function of the physical properties and the geometrical parameters. The improved thermal model can be useful to rapidly predict a thermal behavior of film/substrate systems that are used for microelectronics.

Suggested Citation

  • A. I. Oliva & R. D. Maldonado & O. Ceh & J. E. Corona & H. G. Riveros, 2005. "Study Of A Bimaterial System By An Improved Dynamical Thermal Model," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 12(02), pages 289-298.
    • Handle: RePEc:wsi:srlxxx:v:12:y:2005:i:02:n:s0218625x05007025
    DOI: 10.1142/S0218625X05007025
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