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Study of Dry Oxidation of Aluminum Nitride on Si(111) Substrate Grown by Metalorganic Chemical Vapor Deposition

Author

Listed:
  • F. Wang

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • R. Zhang

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • X. Q. Xiu

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • D. Q. Lu

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • S. L. Gu

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • B. Shen

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • Y. Shi

    (Department of Physics, Nanjing University, Nanjing 210093, China)

  • Y. D. Zheng

    (Department of Physics, Nanjing University, Nanjing 210093, China)

Abstract

We have investigated the dry oxidation behavior of an AlN epilayer on Si(111) substrate by metalorganic chemical vapor deposition (MOCVD) at different temperatures and different oxidation times through XRD analysis and scanning electron microscopy (SEM). The AlN epilayer has been completely oxidized into polycrystallineα-Al2O3after oxidation at 1100°C for 2 h. The ratio ofO2toN2introduced into the furnace has an influence on the structure ofα-Al2O3. There are onlyα-Al2O3(104), (113) diffraction peaks in the XRD curve if theO2:N2is lower than 0.2:1. At the temperature over 1100°C, the oxidation is initiated with a rapid oxidation process, followed by a relatively slow process. These two oxidation stages are respectively related to the interfacial reaction mechanism and the diffusion mechanism.

Suggested Citation

  • F. Wang & R. Zhang & X. Q. Xiu & D. Q. Lu & S. L. Gu & B. Shen & Y. Shi & Y. D. Zheng, 2003. "Study of Dry Oxidation of Aluminum Nitride on Si(111) Substrate Grown by Metalorganic Chemical Vapor Deposition," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 10(04), pages 625-628.
    • Handle: RePEc:wsi:srlxxx:v:10:y:2003:i:04:n:s0218625x03005463
    DOI: 10.1142/S0218625X03005463
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