IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v09y2002i01ns0218625x02002701.html
   My bibliography  Save this article

SOFT X-RAY REFLECTIVITY AND THERMAL STABILITY OF CoCr/C MULTILAYER X-RAY MIRRORS

Author

Listed:
  • H. TAKENAKA

    (NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan)

  • K. NAGAI

    (NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan)

  • H. ITO

    (NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan)

  • S. ICHIMARU

    (NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan)

  • T. SAKUMA

    (Tokyo Gakugei University, Koganei, Tokyo, 184-8501, Japan)

  • K. NAMIKAWA

    (Tokyo Gakugei University, Koganei, Tokyo, 184-8501, Japan)

  • Y. MURAMATSU

    (Japan Atomic Energy Research Institute, Mikazuki, Hyogo 679-5198, Japan)

  • E. GULLIKSON

    (Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA)

  • C. C. PERERA

    (Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA)

Abstract

The development of highly reflective multilayer mirrors for use in the wavelength region around 6 nm is desired for X-ray photoemission spectroscopy for inner-shell excitation using a Schwarzschild objective. For this application, reflectivity is the most critical parameter determining the performance of multilayer mirrors, because the reflectivity of multilayers in the 6 nm region is generally very low. We have designed CoCr/C multilayer mirrors with a comparatively high reflectivity at around normal incidence and have fabricated them by magnetron sputtering. The measured peak reflectivity is about 16% at a wavelength of around 6 nm and an incident angle of 88°. The reflectivity remains almost constant for 4 h under 300°C in an Ar atmosphere.

Suggested Citation

  • H. Takenaka & K. Nagai & H. Ito & S. Ichimaru & T. Sakuma & K. Namikawa & Y. Muramatsu & E. Gullikson & C. C. Perera, 2002. "SOFT X-RAY REFLECTIVITY AND THERMAL STABILITY OF CoCr/C MULTILAYER X-RAY MIRRORS," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 9(01), pages 593-596.
    • Handle: RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002701
    DOI: 10.1142/S0218625X02002701
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X02002701
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X02002701?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002701. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.