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Ablation Of Poly(Methyl Methacrylate) By A Single Pulse Of Soft X-Rays Emitted From Z-Pinch And Laser-Produced Plasmas

Author

Listed:
  • L. JUHA

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • J. KRÁSA

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • A. PRÄG

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • A. CEJNAROVÁ

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • D. CHVOSTOVÁ

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • K. ROHLENA

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • K. JUNGWIRTH

    (Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic)

  • J. KRAVÁRIK

    (Department of Physics, Faculty of Electrical Engineering, Czech Technical University, Technická 2, 166 27 Prague 6, Czech Republic)

  • P. KUBEŠ

    (Department of Physics, Faculty of Electrical Engineering, Czech Technical University, Technická 2, 166 27 Prague 6, Czech Republic)

  • Yu. L. BAKSHAEV

    (Russian Research Center "Kurchatov Institute," 123182 Moscow, Russia)

  • A. S. CHERNENKO

    (Russian Research Center "Kurchatov Institute," 123182 Moscow, Russia)

  • V. D. KOROLEV

    (Russian Research Center "Kurchatov Institute," 123182 Moscow, Russia)

  • V. I. TUMANOV

    (Russian Research Center "Kurchatov Institute," 123182 Moscow, Russia)

  • M. I. TUMANOV

    (Research Institute of Pulsed Systems, 115304 Moscow, Russia)

  • A. BERNARDINELLO

    (Dipartimento di Fisica "G. Occhialini" and INFM, Università degli Studi di Milano Bicocca, Piazza della Scienza 3, 20126 Milano, Italy)

  • J. ULLSCHMIED

    (Institute of Plasma Physics, Czech Academy of Sciences, Za Slovankou 3, 182 21 Prague 8, Czech Republic)

  • F. P. BOODY

    (Ion Light Technologies GmbH, Lessingstrasse 2c, 93077 Bad Abbach, Germany)

Abstract

The efficiency of ablation induced in poly(methyl methacrylate) (PMMA) by single soft X-ray pulses emitted from Z-pinch and laser-produced plasmas was determined. X-ray ablation of PMMA was found to be less efficient than that of teflon (PTFE). Nonthermal effects of the radiation on the polymer structure play a key role in the mechanisms of the ablation, i.e. the ablation can be explained by the formation of radiation-chemical scissions of the polymer chain followed by blowoff of low-molecular fragment fluid into the vacuum. The most promising application of this phenomenon seems to be micropatterning/micromachining.

Suggested Citation

  • L. JUHA & J. KRÁSA & A. PRÄG & A. CEJNAROVÁ & D. CHVOSTOVÁ & K. ROHLENA & K. JUNGWIRTH & J. KRAVÁRIK & P. KUBEŠ & Yu. L. BAKSHAEV & A. S. CHERNENKO & V. D. KOROLEV & V. I. TUMANOV & M. I. TUMANOV & A., 2002. "Ablation Of Poly(Methyl Methacrylate) By A Single Pulse Of Soft X-Rays Emitted From Z-Pinch And Laser-Produced Plasmas," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 9(01), pages 347-352.
    • Handle: RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002257
    DOI: 10.1142/S0218625X02002257
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