X-Ray Reflectometry And Total Reflection Imaging: A New Combined X-Ray Technique

X-ray specular reflectivity measurement is a powerful method for investigating surfaces, and the shape analysis of the X-ray reflectivity curve provides a range of possibilities for the study of surface structure, thin layers and multilayers. The wide field applications of this technique in modern technology explains its increasing use. The typical equipment for this technique is usually a reflectometer with an angular scanning that requires a long time for studying a surface size of a fewmm2. This article proposes a new method for simultaneous detection of several experimental reflectivity curves without incidence angle scanning and thus with a shorter aquisition time, typically 2–60 s. The method is illustrated with a first experiment using a divergent X-ray beam and a 2D detector. Furthermore, such an approach provides a new imaging technique for the surface and interface. The images obtained that way can concern the direct visualization of isolated defects sited on a very flat surface or buried interface; a domain where the X-ray reflectivity cannot be used. The feasibility of X-ray images at grazing incidence has also been demonstrated. The technique will hereafter be noted as total reflection X-ray microscopy (TRXRM).