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Micro-Four-Point Probes In A Uhv Scanning Electron Microscope Forin-Situsurface-Conductivity Measurements

Author

Listed:
  • ICHIRO SHIRAKI

    (Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan)

  • TADAAKI NAGAO

    (Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan;
    Core Research for Evolutional Science and Technology, The Japan Science and Technology Corporation, Kawaguchi Center Building, Hon-cho 4-1-8, Kawaguchi, Saitama 332-0012, Japan)

  • SHUJI HASEGAWA

    (Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan;
    Core Research for Evolutional Science and Technology, The Japan Science and Technology Corporation, Kawaguchi Center Building, Hon-cho 4-1-8, Kawaguchi, Saitama 332-0012, Japan)

  • CHRISTIAN L. PETERSEN

    (Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark)

  • PETER BØGGILD

    (Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark)

  • TORBEN M. HANSEN

    (Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark)

  • FRANÇOIS HANSEN

    (Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark)

Abstract

Forin-situmeasurements of surface conductivity in ultrahigh vacuum (UHV), we have installed micro-four-point probes (probe spacings down to 4 μm) in a UHV scanning electron microscope (SEM) combined with scanning reflection–high-energy electron diffraction (RHEED). With the aid of piezoactuators for precise positioning of the probes, local conductivity of selected surface domains of well-defined superstructures could be measured during SEM and RHEED observations. It was found that the surface sensitivity of the conductivity measurements was enhanced by reducing the probe spacing, enabling the unambiguous detection of surface-state conductivity and the influence of surface defects on the electrical conduction.

Suggested Citation

  • Ichiro Shiraki & Tadaaki Nagao & Shuji Hasegawa & Christian L. Petersen & Peter Bøggild & Torben M. Hansen & François Hansen, 2000. "Micro-Four-Point Probes In A Uhv Scanning Electron Microscope Forin-Situsurface-Conductivity Measurements," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 7(05n06), pages 533-537.
    • Handle: RePEc:wsi:srlxxx:v:07:y:2000:i:05n06:n:s0218625x00000592
    DOI: 10.1142/S0218625X00000592
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