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Energy-Filtered Rheed And Reels Forin Situreal Time Analysis During Film Growth

Author

Listed:
  • HARRY A. ATWATER

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

  • C. C. AHN

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

  • S. S. WONG

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

  • G. HE

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

  • H. YOSHINO

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

  • S. NIKZAD

    (Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA)

Abstract

Energy-filtered reflection high energy electron diffraction and reflection electron energy loss spectroscopy expand the usefulness of reflection high energy electron diffraction for quantitative structure determination and surface spectroscopy during film growth. Several implementations of energy-filtered reflection high energy electron diffraction are discussed, along with the progress and prospects for structure determination. New developments in parallel detection reflection electron energy loss spectroscopy (PREELS) enable the use of this method to obtain surface-spectroscopic information in real time during thin film growth, greatly expanding the range of surface information available during growth.

Suggested Citation

  • Harry A. Atwater & C. C. Ahn & S. S. Wong & G. He & H. Yoshino & S. Nikzad, 1997. "Energy-Filtered Rheed And Reels Forin Situreal Time Analysis During Film Growth," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 4(03), pages 525-534.
    • Handle: RePEc:wsi:srlxxx:v:04:y:1997:i:03:n:s0218625x9700050x
    DOI: 10.1142/S0218625X9700050X
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