Scenario-based multi-objective robust scheduling for a semiconductor production line

Scheduling problems of semiconductor manufacturing systems (SMS) with the goal of optimising some classical performance indices (NP-hard), tend to be increasingly complicated due to stochastic uncertainties. This paper targets the robust scheduling problem of an SMS with uncertain processing times. A three-stage multi-objective robust optimisation (MORO) approach is proposed, that can collaboratively optimise the performance indices and their robustness measures. In the first stage, this paper studies the scheduling problem in the deterministic environment and obtains feasible scheduling strategies that perform well in four performance indices (the average cycle time (CT), the on-time delivery rate (ODR), the throughput (TP), and the total movement amount of wafers (MOV)). Then, in the second stage, the uncertainties are introduced into the production system. In the third stage, this paper proposes a hybrid method consisting of scenario planning, discrete simulation, and multi-objective optimisation to obtain an approximately and more robust optimal solution from the feasible scheduling strategy set. The proposed MORO approach is tested in a semiconductor experiment production line and makes a full analysis to illustrate the effectiveness of our method. The results show that our MORO is superior concerning the total robustness with multi-objective.