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Combined scheduling algorithm for re-entrant batch-processing machines in semiconductor wafer manufacturing

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  • Wenyou Jia
  • Zhibin Jiang
  • You Li

Abstract

In this paper, a new combined scheduling algorithm is proposed to address the problem of minimising total weighted tardiness on re-entrant batch-processing machines (RBPMs) with incompatible job families in the semiconductor wafer fabrication system (SWFS). The general combined scheduling algorithm forms batches according to parameters from the real-time scheduling simulation platform (ReS2), and then sequences batches through slack-based mixed integer linear programming model (S-MILP), which is defined as batch-oriented combined scheduling algorithm. The new combined scheduling algorithm obtains families’ parameters from ReS2 and then sequences these families through modified S-MILP, which is defined as family-oriented combined scheduling algorithm. With rolling horizon control strategy, two combined scheduling algorithms can update RBPMs scheduling continually. The experiments are implemented on ReS2 of SWFS and ILOG CPLEX, respectively. The results demonstrate the effectiveness of our proposed methods.

Suggested Citation

  • Wenyou Jia & Zhibin Jiang & You Li, 2015. "Combined scheduling algorithm for re-entrant batch-processing machines in semiconductor wafer manufacturing," International Journal of Production Research, Taylor & Francis Journals, vol. 53(6), pages 1866-1879, March.
    • Handle: RePEc:taf:tprsxx:v:53:y:2015:i:6:p:1866-1879
    DOI: 10.1080/00207543.2014.965355
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    Cited by:

    1. Zhengcai Cao & Lijie Zhou & Biao Hu & Chengran Lin, 2019. "An Adaptive Scheduling Algorithm for Dynamic Jobs for Dealing with the Flexible Job Shop Scheduling Problem," Business & Information Systems Engineering: The International Journal of WIRTSCHAFTSINFORMATIK, Springer;Gesellschaft für Informatik e.V. (GI), vol. 61(3), pages 299-309, June.
    2. Jianxin Fang & Brenda Cheang & Andrew Lim, 2023. "Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey," Sustainability, MDPI, vol. 15(17), pages 1-44, August.
    3. Sungwook Yoon & Jihyun Kim & Sukjae Jeong, 2017. "RETRACTED: The Optimal Decision Combination in Semiconductor Manufacturing," Sustainability, MDPI, vol. 9(10), pages 1, October.

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