IDEAS home Printed from https://ideas.repec.org/a/spr/joptap/v97y1998i3d10.1023_a1022694210246.html
   My bibliography  Save this article

Optimal Control of a Chemical Vapor Deposition Reactor

Author

Listed:
  • A. Friedman

    (University of Minnesota)

  • B. Hu

    (University of Notre Dame)

Abstract

We study a simple model of chemical vapor deposition on a silicon wafer. The control is the flux of chemical species, and the objective is to grow the semiconductor film so that its surface attains a prescribed profile as nearly as possible. The surface is spatially fast oscillating due to the small feature scale, and therefore the problem is formulated in terms of its homogenized approximation. We prove that the optimal control is bang-bang, and we use this information to develop a numerical scheme for computing the optimal control.

Suggested Citation

  • A. Friedman & B. Hu, 1998. "Optimal Control of a Chemical Vapor Deposition Reactor," Journal of Optimization Theory and Applications, Springer, vol. 97(3), pages 623-644, June.
    • Handle: RePEc:spr:joptap:v:97:y:1998:i:3:d:10.1023_a:1022694210246
    DOI: 10.1023/A:1022694210246
    as

    Download full text from publisher

    File URL: http://link.springer.com/10.1023/A:1022694210246
    File Function: Abstract
    Download Restriction: Access to the full text of the articles in this series is restricted.
    File URL: https://libkey.io/10.1023/A:1022694210246?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Vicente, Luis N., 2002. "Local analysis of a new multipliers method," European Journal of Operational Research, Elsevier, vol. 143(2), pages 432-451, December.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:spr:joptap:v:97:y:1998:i:3:d:10.1023_a:1022694210246. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.springer.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.