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A Fuzzy Collaborative Sensor Network for Semiconductor Manufacturing Cycle Time Forecasting

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  • Yu-Cheng Lin
  • Toly Chen
  • Yu-Cheng Wang

Abstract

Network based sensing has become an important field of research, and it is expected that new applications of remote sensing will be developed. A fuzzy collaborative sensor network is developed in this study to predict the cycle time of a job in a semiconductor manufacturing factory, which is an important task for the factory. In the fuzzy collaborative sensor network, each sensor detects the status of a particular job as well as various environmental conditions present in the factory and uses a fuzzy neural network to analyze the received information. Each sensor communicates its settings and forecasting results to other sensors with the aid of a central control unit. According to the experimental results, the aggregate forecasting performance was considerably improved through the sensors' collaboration.

Suggested Citation

  • Yu-Cheng Lin & Toly Chen & Yu-Cheng Wang, 2013. "A Fuzzy Collaborative Sensor Network for Semiconductor Manufacturing Cycle Time Forecasting," International Journal of Distributed Sensor Networks, , vol. 9(3), pages 257276-2572, March.
    • Handle: RePEc:sae:intdis:v:9:y:2013:i:3:p:257276
    DOI: 10.1155/2013/257276
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