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Flexible metal-oxide devices made by room-temperature photochemical activation of sol–gel films

Author

Listed:
  • Yong-Hoon Kim

    (Flexible Display Research Center, Korea Electronics Technology Institute, Seongnam 463-816, Korea)

  • Jae-Sang Heo

    (School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Korea)

  • Tae-Hyeong Kim

    (Flexible Display Research Center, Korea Electronics Technology Institute, Seongnam 463-816, Korea)

  • Sungjun Park

    (School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712, Korea)

  • Myung-Han Yoon

    (School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju 500-712, Korea
    World Class University, Gwangju Institute of Science and Technology, Gwangju 500-712, Korea)

  • Jiwan Kim

    (Flexible Display Research Center, Korea Electronics Technology Institute, Seongnam 463-816, Korea)

  • Min Suk Oh

    (Flexible Display Research Center, Korea Electronics Technology Institute, Seongnam 463-816, Korea)

  • Gi-Ra Yi

    (Sungkyunkwan University, Suwon 440-746, Korea)

  • Yong-Young Noh

    (Hanbat National University, Daejeon 305-719, Korea)

  • Sung Kyu Park

    (School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Korea)

Abstract

A method for annealing metal-oxide semiconductor films with deep-ultraviolet light yields thin-film transistors with performance comparable to that of thermally annealed devices, and widens the range of substrates on which such devices can be fabricated.

Suggested Citation

  • Yong-Hoon Kim & Jae-Sang Heo & Tae-Hyeong Kim & Sungjun Park & Myung-Han Yoon & Jiwan Kim & Min Suk Oh & Gi-Ra Yi & Yong-Young Noh & Sung Kyu Park, 2012. "Flexible metal-oxide devices made by room-temperature photochemical activation of sol–gel films," Nature, Nature, vol. 489(7414), pages 128-132, September.
  • Handle: RePEc:nat:nature:v:489:y:2012:i:7414:d:10.1038_nature11434
    DOI: 10.1038/nature11434
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    Cited by:

    1. Dhas, Suprimkumar D. & Thonge, Pragati N. & Mendhe, Avinash C. & Yun, Jonghyeon & Kim, Daewon, 2024. "Nickel manganite-based materials for electrochemical supercapacitors: An overview," Renewable and Sustainable Energy Reviews, Elsevier, vol. 204(C).

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