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Soft X-ray microscopy at a spatial resolution better than 15 nm

Author

Listed:
  • Weilun Chao

    (Lawrence Berkeley National Laboratory,
    University of California)

  • Bruce D. Harteneck

    (Lawrence Berkeley National Laboratory,)

  • J. Alexander Liddle

    (Lawrence Berkeley National Laboratory,)

  • Erik H. Anderson

    (Lawrence Berkeley National Laboratory,)

  • David T. Attwood

    (Lawrence Berkeley National Laboratory,
    University of California)

Abstract

X-ray nanomicroscopy The study of nanostructures is creating a need for microscopes that can see beyond the limits of conventional visible light and ultraviolet microscopes. X-ray imaging is a promising option. A new microscope described this week achieves unprecedented resolution, and has the ability to see through containing material. It features a specially made two-component zone plate — a lens with concentric zones rather like the rings in the Fresnel lenses familiar in overhead projectors and elsewhere — that makes use of diffraction to project an image into a CCD camera sensitive to soft X-rays. Spatial resolution of better than 15 nm is possible.

Suggested Citation

  • Weilun Chao & Bruce D. Harteneck & J. Alexander Liddle & Erik H. Anderson & David T. Attwood, 2005. "Soft X-ray microscopy at a spatial resolution better than 15 nm," Nature, Nature, vol. 435(7046), pages 1210-1213, June.
    • Handle: RePEc:nat:nature:v:435:y:2005:i:7046:d:10.1038_nature03719
    DOI: 10.1038/nature03719
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    Cited by:

    1. Jun He & Hong Liu & Dong Zhao & Jodhbir S. Mehta & Cheng-Wei Qiu & Fangwen Sun & Jinghua Teng & Kun Huang, 2024. "High-order diffraction for optical superfocusing," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    2. Takenori Shimamura & Yoko Takeo & Fumika Moriya & Takashi Kimura & Mari Shimura & Yasunori Senba & Hikaru Kishimoto & Haruhiko Ohashi & Kenta Shimba & Yasuhiko Jimbo & Hidekazu Mimura, 2024. "Ultracompact mirror device for forming 20-nm achromatic soft-X-ray focus toward multimodal and multicolor nanoanalyses," Nature Communications, Nature, vol. 15(1), pages 1-12, December.

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