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A bioinspired permeable junction approach for sustainable device microfabrication

Author

Listed:
  • Chuanwang Yang

    (University of Chicago)

  • Pengju Li

    (University of Chicago)

  • Chen Wei

    (University of California, Los Angeles)

  • Aleksander Prominski

    (University of Chicago
    University of Chicago
    University of Chicago)

  • Jingcheng Ma

    (University of Chicago)

  • Changxu Sun

    (University of Chicago)

  • Jiping Yue

    (University of Chicago)

  • Zhe Cheng

    (University of Chicago)

  • Jing Zhang

    (University of Chicago)

  • Brennan Ashwood

    (University of Chicago
    University of Chicago
    University of Chicago)

  • Wen Li

    (University of Chicago)

  • Jiuyun Shi

    (University of Chicago)

  • Kun Hou

    (University of Chicago)

  • Fengyuan Shi

    (University of Illinois Chicago)

  • Philip Griffin

    (University of Chicago)

  • Lihua Jin

    (University of California, Los Angeles)

  • Bozhi Tian

    (University of Chicago
    University of Chicago
    University of Chicago)

Abstract

Microfabrication, the process of fabricating small structures usually in micrometre scale, has wide practical applications but confronts sustainability challenges due to the substantial chemical and energy consumption during the patterning and transfer stages. Here we introduce a bioinspired permeable junction approach involving patterning on biopolymer matrices with a salt-assisted photochemical synthesis to advance sustainable microfabrication. This approach leverages an ‘actuator-inhibitor-neutralizer’ process for on-demand adhesion and delamination. Utilizing water as a green actuation agent, our method realizes instantaneous delamination (

Suggested Citation

  • Chuanwang Yang & Pengju Li & Chen Wei & Aleksander Prominski & Jingcheng Ma & Changxu Sun & Jiping Yue & Zhe Cheng & Jing Zhang & Brennan Ashwood & Wen Li & Jiuyun Shi & Kun Hou & Fengyuan Shi & Phili, 2024. "A bioinspired permeable junction approach for sustainable device microfabrication," Nature Sustainability, Nature, vol. 7(9), pages 1190-1203, September.
    • Handle: RePEc:nat:natsus:v:7:y:2024:i:9:d:10.1038_s41893-024-01389-5
    DOI: 10.1038/s41893-024-01389-5
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