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Graphene-enabled and directed nanomaterial placement from solution for large-scale device integration

Author

Listed:
  • Michael Engel

    (IBM Research)

  • Damon B. Farmer

    (IBM Research)

  • Jaione Tirapu Azpiroz

    (IBM Research)

  • Jung-Woo T. Seo

    (Northwestern University)

  • Joohoon Kang

    (Northwestern University)

  • Phaedon Avouris

    (IBM Research)

  • Mark C. Hersam

    (Northwestern University)

  • Ralph Krupke

    (Karlsruhe Institute of Technology
    DFG Center for Functional Nanostructures (CFN)
    Technische Universität Darmstadt)

  • Mathias Steiner

    (IBM Research
    IBM Research)

Abstract

Directed placement of solution-based nanomaterials at predefined locations with nanoscale precision limits bottom-up integration in semiconductor process technology. We report a method for electric-field-assisted placement of nanomaterials from solution by means of large-scale graphene layers featuring nanoscale deposition sites. The structured graphene layers are prepared via either transfer or synthesis on standard substrates, and then are removed once nanomaterial deposition is completed, yielding material assemblies with nanoscale resolution that cover surface areas >1 mm2. In order to demonstrate the broad applicability, we have assembled representative zero-dimensional, one-dimensional, and two-dimensional semiconductors at predefined substrate locations and integrated them into nanoelectronic devices. Ultimately, this method opens a route to bottom-up integration of nanomaterials for industry-scale applications.

Suggested Citation

  • Michael Engel & Damon B. Farmer & Jaione Tirapu Azpiroz & Jung-Woo T. Seo & Joohoon Kang & Phaedon Avouris & Mark C. Hersam & Ralph Krupke & Mathias Steiner, 2018. "Graphene-enabled and directed nanomaterial placement from solution for large-scale device integration," Nature Communications, Nature, vol. 9(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:9:y:2018:i:1:d:10.1038_s41467-018-06604-4
    DOI: 10.1038/s41467-018-06604-4
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    Cited by:

    1. Anna P. Ovvyan & Min-Ken Li & Helge Gehring & Fabian Beutel & Sandeep Kumar & Frank Hennrich & Li Wei & Yuan Chen & Felix Pyatkov & Ralph Krupke & Wolfram H. P. Pernice, 2023. "An electroluminescent and tunable cavity-enhanced carbon-nanotube-emitter in the telecom band," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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