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A high-brightness large-diameter graphene coated point cathode field emission electron source

Author

Listed:
  • Xiuyuan Shao

    (National University of Singapore)

  • Avinash Srinivasan

    (National University of Singapore)

  • Wei Kean Ang

    (National University of Singapore)

  • Anjam Khursheed

    (National University of Singapore
    National University of Singapore)

Abstract

There have been several long-standing problems of cold field emission sources for electron microscopy and lithography that have prevented their widespread use, such as their inherent ultrahigh vacuum condition requirement ( 10−8 torr) and has an ultralow work function value of 1.10 ± 0.07 eV. It has an estimated reduced brightness value of 1.46 × 109 A m−2 sr−1 V−1 for cathode tip-radius of 170 nm and the measured energy spread ranges from 0.246 eV to 0.420 eV for a tip radii range of 260 nm to 500 nm, which is comparable to state-of-the-art conventional cold field emission sources.

Suggested Citation

  • Xiuyuan Shao & Avinash Srinivasan & Wei Kean Ang & Anjam Khursheed, 2018. "A high-brightness large-diameter graphene coated point cathode field emission electron source," Nature Communications, Nature, vol. 9(1), pages 1-8, December.
  • Handle: RePEc:nat:natcom:v:9:y:2018:i:1:d:10.1038_s41467-018-03721-y
    DOI: 10.1038/s41467-018-03721-y
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