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Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Author

Listed:
  • Žarko Zobenica

    (Eindhoven University of Technology)

  • Rob W. Heijden

    (Eindhoven University of Technology)

  • Maurangelo Petruzzella

    (Eindhoven University of Technology)

  • Francesco Pagliano

    (Eindhoven University of Technology)

  • Rick Leijssen

    (Center for Nanophotonics, FOM Institute AMOLF)

  • Tian Xia

    (Eindhoven University of Technology)

  • Leonardo Midolo

    (Niels Bohr Institute, University of Copenhagen)

  • Michele Cotrufo

    (Eindhoven University of Technology)

  • YongJin Cho

    (Eindhoven University of Technology)

  • Frank W. M. Otten

    (Eindhoven University of Technology)

  • Ewold Verhagen

    (Center for Nanophotonics, FOM Institute AMOLF)

  • Andrea Fiore

    (Eindhoven University of Technology)

Abstract

Spectrometry is widely used for the characterization of materials, tissues, and gases, and the need for size and cost scaling is driving the development of mini and microspectrometers. While nanophotonic devices provide narrowband filtering that can be used for spectrometry, their practical application has been hampered by the difficulty of integrating tuning and read-out structures. Here, a nano-opto-electro-mechanical system is presented where the three functionalities of transduction, actuation, and detection are integrated, resulting in a high-resolution spectrometer with a micrometer-scale footprint. The system consists of an electromechanically tunable double-membrane photonic crystal cavity with an integrated quantum dot photodiode. Using this structure, we demonstrate a resonance modulation spectroscopy technique that provides subpicometer wavelength resolution. We show its application in the measurement of narrow gas absorption lines and in the interrogation of fiber Bragg gratings. We also explore its operation as displacement-to-photocurrent transducer, demonstrating optomechanical displacement sensing with integrated photocurrent read-out.

Suggested Citation

  • Žarko Zobenica & Rob W. Heijden & Maurangelo Petruzzella & Francesco Pagliano & Rick Leijssen & Tian Xia & Leonardo Midolo & Michele Cotrufo & YongJin Cho & Frank W. M. Otten & Ewold Verhagen & Andrea, 2017. "Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology," Nature Communications, Nature, vol. 8(1), pages 1-8, December.
  • Handle: RePEc:nat:natcom:v:8:y:2017:i:1:d:10.1038_s41467-017-02392-5
    DOI: 10.1038/s41467-017-02392-5
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    Cited by:

    1. Jacopo M. Ponti & Xuanyi Zhao & Luca Iorio & Tommaso Maggioli & Marco Colangelo & Benyamin Davaji & Raffaele Ardito & Richard V. Craster & Cristian Cassella, 2024. "Localized topological states beyond Fano resonances via counter-propagating wave mode conversion in piezoelectric microelectromechanical devices," Nature Communications, Nature, vol. 15(1), pages 1-7, December.

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