Author
Listed:
- Hiroki Ota
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Kevin Chen
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Yongjing Lin
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Daisuke Kiriya
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Hiroshi Shiraki
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Zhibin Yu
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
- Tae-Jun Ha
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory
Present address: Department of Electronic Materials Engineering, Kwangwoon University, Seoul 139-701, Republic of Korea)
- Ali Javey
(University of California, Berkeley
Berkeley Sensor and Actuator Center, University of California, Berkeley
Lawrence Berkeley National Laboratory)
Abstract
Mechanically deformable devices and sensors enable conformal coverage of electronic systems on curved and soft surfaces. Sensors utilizing liquids confined in soft templates as the sensing component present the ideal platform for such applications, as liquids are inherently more deformable than solids. However, to date, liquid-based devices have been limited to metal lines based on a single-liquid component given the difficulty in the fabrication of liquid-based junctions due to intermixing. Here, we demonstrate a robust platform for the fabrication of liquid–liquid ‘heterojunction’ devices, presenting an important advancement towards the realization of liquid-state electronic systems. The device architecture and fabrication scheme we present are generic for different sensing liquids, enabling demonstration of sensors responsive to different stimuli. As a proof of concept, we demonstrate temperature, humidity and oxygen sensors by using different ionic liquids, exhibiting high sensitivity with excellent mechanical deformability arising from the inherent property of the liquid phase.
Suggested Citation
Hiroki Ota & Kevin Chen & Yongjing Lin & Daisuke Kiriya & Hiroshi Shiraki & Zhibin Yu & Tae-Jun Ha & Ali Javey, 2014.
"Highly deformable liquid-state heterojunction sensors,"
Nature Communications, Nature, vol. 5(1), pages 1-9, December.
Handle:
RePEc:nat:natcom:v:5:y:2014:i:1:d:10.1038_ncomms6032
DOI: 10.1038/ncomms6032
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