IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v15y2024i1d10.1038_s41467-024-55210-0.html
   My bibliography  Save this article

Infinitesimal optical singularity ruler for three-dimensional picometric metrology

Author

Listed:
  • Haixiang Ma

    (Shenzhen University
    Zhejiang Lab)

  • Yuquan Zhang

    (Shenzhen University)

  • Jiakang Zhou

    (Shenzhen University)

  • Fu Feng

    (Zhejiang Lab
    Zhejiang University)

  • Michael G. Somekh

    (Zhejiang Lab
    University of Nottingham)

  • Changjun Min

    (Shenzhen University)

  • Xiaocong Yuan

    (Shenzhen University
    Zhejiang Lab)

Abstract

Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of ~4.5 pm (~λ/140000) in the transverse direction and ~24.2 pm (~λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm.

Suggested Citation

  • Haixiang Ma & Yuquan Zhang & Jiakang Zhou & Fu Feng & Michael G. Somekh & Changjun Min & Xiaocong Yuan, 2024. "Infinitesimal optical singularity ruler for three-dimensional picometric metrology," Nature Communications, Nature, vol. 15(1), pages 1-6, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-55210-0
    DOI: 10.1038/s41467-024-55210-0
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-024-55210-0
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-024-55210-0?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-55210-0. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.