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Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Author

Listed:
  • Lingyu Huang

    (Southern University of Science and Technology)

  • Kang Xu

    (Southern University of Science and Technology)

  • Dandan Yuan

    (Southern University of Science and Technology)

  • Jin Hu

    (Southern University of Science and Technology)

  • Xinwei Wang

    (Iowa State University)

  • Shaolin Xu

    (Southern University of Science and Technology)

Abstract

Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm2) revealing excellent infrared absorption (3–7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce.

Suggested Citation

  • Lingyu Huang & Kang Xu & Dandan Yuan & Jin Hu & Xinwei Wang & Shaolin Xu, 2022. "Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-33644-8
    DOI: 10.1038/s41467-022-33644-8
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    Cited by:

    1. Woo Young Kim & Bo Wook Seo & Sang Hoon Lee & Tae Gyung Lee & Sin Kwon & Won Seok Chang & Sang-Hoon Nam & Nicholas X. Fang & Seok Kim & Young Tae Cho, 2023. "Quasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moiré patterns," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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