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In situ microbeam surface X-ray scattering reveals alternating step kinetics during crystal growth

Author

Listed:
  • Guangxu Ju

    (Argonne National Laboratory
    Lumileds Lighting Co.)

  • Dongwei Xu

    (Argonne National Laboratory
    Huazhong University of Science and Technology)

  • Carol Thompson

    (Northern Illinois University)

  • Matthew J. Highland

    (Argonne National Laboratory)

  • Jeffrey A. Eastman

    (Argonne National Laboratory)

  • Weronika Walkosz

    (Lake Forest College)

  • Peter Zapol

    (Argonne National Laboratory)

  • G. Brian Stephenson

    (Argonne National Laboratory)

Abstract

The stacking sequence of hexagonal close-packed and related crystals typically results in steps on vicinal {0001} surfaces that have alternating A and B structures with different growth kinetics. However, because it is difficult to experimentally identify which step has the A or B structure, it has not been possible to determine which has faster adatom attachment kinetics. Here we show that in situ microbeam surface X-ray scattering can determine whether A or B steps have faster kinetics under specific growth conditions. We demonstrate this for organo-metallic vapor phase epitaxy of (0001) GaN. X-ray measurements performed during growth find that the average width of terraces above A steps increases with growth rate, indicating that attachment rate constants are higher for A steps, in contrast to most predictions. Our results have direct implications for understanding the atomic-scale mechanisms of GaN growth and can be applied to a wide variety of related crystals.

Suggested Citation

  • Guangxu Ju & Dongwei Xu & Carol Thompson & Matthew J. Highland & Jeffrey A. Eastman & Weronika Walkosz & Peter Zapol & G. Brian Stephenson, 2021. "In situ microbeam surface X-ray scattering reveals alternating step kinetics during crystal growth," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
  • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-21927-5
    DOI: 10.1038/s41467-021-21927-5
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