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Electromechanically reconfigurable optical nano-kirigami

Author

Listed:
  • Shanshan Chen

    (Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology)

  • Zhiguang Liu

    (Chinese Academy of Sciences)

  • Huifeng Du

    (Massachusetts Institute of Technology)

  • Chengchun Tang

    (Chinese Academy of Sciences)

  • Chang-Yin Ji

    (Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology)

  • Baogang Quan

    (Chinese Academy of Sciences)

  • Ruhao Pan

    (Chinese Academy of Sciences)

  • Lechen Yang

    (Chinese Academy of Sciences)

  • Xinhao Li

    (Massachusetts Institute of Technology)

  • Changzhi Gu

    (Chinese Academy of Sciences)

  • Xiangdong Zhang

    (Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology)

  • Yugui Yao

    (Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology)

  • Junjie Li

    (Chinese Academy of Sciences)

  • Nicholas X. Fang

    (Massachusetts Institute of Technology)

  • Jiafang Li

    (Beijing Key Lab of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology
    Chinese Academy of Sciences)

Abstract

Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO2/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale.

Suggested Citation

  • Shanshan Chen & Zhiguang Liu & Huifeng Du & Chengchun Tang & Chang-Yin Ji & Baogang Quan & Ruhao Pan & Lechen Yang & Xinhao Li & Changzhi Gu & Xiangdong Zhang & Yugui Yao & Junjie Li & Nicholas X. Fan, 2021. "Electromechanically reconfigurable optical nano-kirigami," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-21565-x
    DOI: 10.1038/s41467-021-21565-x
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    Cited by:

    1. Yun, Lingxiang & Xiao, Minkun & Li, Lin, 2022. "Vehicle-to-manufacturing (V2M) system: A novel approach to improve energy demand flexibility for demand response towards sustainable manufacturing," Applied Energy, Elsevier, vol. 323(C).

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