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Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities

Author

Listed:
  • Ruchika Dhawan

    (The University of Texas at Dallas)

  • Prabuddha Madusanka

    (The University of Texas at Dallas)

  • Gangyi Hu

    (The University of Texas at Dallas
    CGG)

  • Jeff Debord

    (Texas Instruments Incorporated
    Microelectronic Devices IP LLC)

  • Toan Tran

    (Texas Instruments Incorporated)

  • Kenneth Maggio

    (Texas Instruments Incorporated)

  • Hal Edwards

    (Texas Instruments Incorporated)

  • Mark Lee

    (The University of Texas at Dallas)

Abstract

Microelectronic thermoelectric generators are one potential solution to energizing energy autonomous electronics, such as internet-of-things sensors, that must carry their own power source. However, thermoelectric generators with the mm2 footprint area necessary for on-chip integration made from high thermoelectric figure-of-merit materials have been unable to produce the voltage and power levels required to run Si electronics using common temperature differences. We present microelectronic thermoelectric generators using Si0.97Ge0.03, made by standard Si processing, with high voltage and power generation densities that are comparable to or better than generators using high figure-of-merit materials. These Si-based thermoelectric generators have

Suggested Citation

  • Ruchika Dhawan & Prabuddha Madusanka & Gangyi Hu & Jeff Debord & Toan Tran & Kenneth Maggio & Hal Edwards & Mark Lee, 2020. "Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities," Nature Communications, Nature, vol. 11(1), pages 1-8, December.
    • Handle: RePEc:nat:natcom:v:11:y:2020:i:1:d:10.1038_s41467-020-18122-3
    DOI: 10.1038/s41467-020-18122-3
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    Cited by:

    1. Yihan Liu & Hao-Yuan Cheng & Jonathan A. Malen & Feng Xiong, 2024. "Thermoelectric active cooling for transient hot spots in microprocessors," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    2. Jia, Yuan & Wang, Baojie & Tian, Jinpeng & Song, Qiuming & Chen, Yulong & Zhang, Wenwei & Wang, Cheng & Sun, Hao & Zhang, Zhixing, 2024. "A thermal conductivity varying 3D numerical model for parametric study of a silicon-based nano thermoelectric generator," Energy, Elsevier, vol. 293(C).
    3. Guo, Rui & Zhuo, Kai & Li, Qiang & Wang, Tao & Sang, Shengbo & Zhang, Hulin, 2023. "Triboelectric-electromagnetic hybrid generator assisted by a shape memory alloy wire for water quality monitoring and waste heat collecting," Applied Energy, Elsevier, vol. 348(C).
    4. Matteo d’Angelo & Carmen Galassi & Nora Lecis, 2023. "Thermoelectric Materials and Applications: A Review," Energies, MDPI, vol. 16(17), pages 1-50, September.

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