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Boundary-directed epitaxy of block copolymers

Author

Listed:
  • Robert M. Jacobberger

    (University of Wisconsin-Madison)

  • Vikram Thapar

    (Chonnam National University)

  • Guang-Peng Wu

    (University of Chicago
    Zhejiang University)

  • Tzu-Hsuan Chang

    (University of Wisconsin-Madison
    National Taiwan University)

  • Vivek Saraswat

    (University of Wisconsin-Madison)

  • Austin J. Way

    (University of Wisconsin-Madison)

  • Katherine R. Jinkins

    (University of Wisconsin-Madison)

  • Zhenqiang Ma

    (University of Wisconsin-Madison
    University of Wisconsin-Madison
    University of Wisconsin-Madison)

  • Paul F. Nealey

    (University of Chicago)

  • Su-Mi Hur

    (Chonnam National University)

  • Shisheng Xiong

    (University of Chicago
    Fudan University)

  • Michael S. Arnold

    (University of Wisconsin-Madison)

Abstract

Directed self-assembly of block copolymers (BCPs) enables nanofabrication at sub-10 nm dimensions, beyond the resolution of conventional lithography. However, directing the position, orientation, and long-range lateral order of BCP domains to produce technologically-useful patterns is a challenge. Here, we present a promising approach to direct assembly using spatial boundaries between planar, low-resolution regions on a surface with different composition. Pairs of boundaries are formed at the edges of isolated stripes on a background substrate. Vertical lamellae nucleate at and are pinned by chemical contrast at each stripe/substrate boundary, align parallel to boundaries, selectively propagate from boundaries into stripe interiors (whereas horizontal lamellae form on the background), and register to wide stripes to multiply the feature density. Ordered BCP line arrays with half-pitch of 6.4 nm are demonstrated on stripes >80 nm wide. Boundary-directed epitaxy provides an attractive path towards assembling, creating, and lithographically defining materials on sub-10 nm scales.

Suggested Citation

  • Robert M. Jacobberger & Vikram Thapar & Guang-Peng Wu & Tzu-Hsuan Chang & Vivek Saraswat & Austin J. Way & Katherine R. Jinkins & Zhenqiang Ma & Paul F. Nealey & Su-Mi Hur & Shisheng Xiong & Michael S, 2020. "Boundary-directed epitaxy of block copolymers," Nature Communications, Nature, vol. 11(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:11:y:2020:i:1:d:10.1038_s41467-020-17938-3
    DOI: 10.1038/s41467-020-17938-3
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    Cited by:

    1. Shuaishuai Zhu & Maoji Zhao & Hongru Zhou & Yingfeng Wen & Yong Wang & Yonggui Liao & Xingping Zhou & Xiaolin Xie, 2023. "One-pot synthesis of hyperbranched polymers via visible light regulated switchable catalysis," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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